NAVIO DIGITAL MATCHING NETWORK QUICK, ACCURATE, AND REPEATABLE DIGITAL IMPEDANCE MATCHING Typical Tune Time Two to three seconds ©2018 Advanced Energy Industries, Inc.

NAVIO DIGITAL MATCHING NETWORK Economical, Configurable Matching Network Solution Experience simplicity and high reliability in a single, affordable package. The Navio matching network leverages Advanced Energy’s power expertise to precisely match complex plasma impedance to your tuning range. It’s quick, accurate, and repeatable. Available in multiple power ranges and frequencies, choose from a standard offering or a configurable design. Installation is virtually plug-and-play with Advanced Energy’s RF power supplies. Virtual front panel software is available for monitoring. The compact, air-cooled...

Product Highlights ■ Improve throughput, increase yield, and reduce production costs ■ Quick, accurate, and repeatable impedance matching ■ Optimized, off-the-shelf functionality for many applications ■ Generous menu of configuration options for more sophisticated processes ■ Wide power and frequency ranges ■ Virtual Front Panel (VFP) software for real-time process power and impedance measurement and analysis Market Application ■ Solar PV ■ Industrial ■ Flat panel display ■ MEMS manufacturing Capacitively and Inductively Coupled Plasma Process Applications ■PECVD ■ Etch/clean ■ PVD

NAVIO DIGITAL MATCHING NETWORK Improve Throughput, Increase Yield, and Reduce Production Costs The Navio matching network automatically tunes the complex impedance of a plasma to 50 Ω or your desired impedance. The digital tuning algorithm and stepper motor drive produce a quicker, more accurate, and repeatable response compared to traditional analog tuning methods — for improved throughput, increased yield, and reduced production costs. The Navio matching network is fast and highly accurate, designed to always tune to the desired impedance point. Its repeatable response minimizes delivered power...

NAVIO DIGITAL MATCHING NETWORK Multiple Tuning Ranges Figure 1 highlights the pre-defined tuning ranges available for 13.56 MHz Navio matching networks. If necessary, tuning ranges can be adjusted during your development phase; our field service engineers will work with you to pinpoint the range that’s right for your application and quickly reconfigure your unit in the field. Figure 1. Pre-defined tuning range options for the 13.56 MHz Navio™ matching network. Similar op-tions are available for 27.12 MHz, 40.68 MHz, and 60 MHz models. Install and Operate with Ease The Navio matching network can...

NAVIO DIGITAL MATCHING NETWORK

NAVIO DIGITAL MATCHING NETWORK Figure 2: Navio™ standard dimensions Figure 3: Navio™ flat pack dimensions

ABOUT ADVANCED ENERGY Advanced Energy (AE) has devoted more than three decades to perfecting power for its global customers. AE designs and manufactures highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. AE’s power solutions enable customer innovation in complex semiconductor and industrial thin film plasma manufacturing processes, demanding high and low voltage applications, and temperature-critical thermal processes. With deep applications know-how and responsive service and support across the globe, AE builds collaborative...