NAVIGATOR® II DIGITAL MATCHING NETWORKS = RAPID, ACCURATE, AND RELIABLE DIGITALLY-TUNED MATCHING

NAVIGATOR® II DIGITAL MATCHING NETWORKS Fully digitally tuned matching over a wide range of load impedances enables new levels of process optimization and repeatability.

Navigator® II Digital Matching Networks The versatile Navigator® II matching network provides rapid, accurate, and reliable matching across a wide range of power requirements up to 30 kW and frequencies up to 60 MHz. Equipped with microprocessor-controlled stepper motor drives and advanced tuning algorithms, it offers greater consistency and accuracy than traditional analog-based tuning methods. Benefits ■ Speeds tuning/matching response time ■ Tightens process control ■ Helps increase tool throughput and product yield Features ■ Digital architecture with enhanced tuning algorithms ■ Pulsed-RF...

NAVIGATOR® II DIGITAL MATCHING NETWORKS Swift, Accurate, Repeatable Response The Navigator® II matching network’s advanced digital tuning algorithms and motor drive raise the bar on tuning speed, accuracy, and repeatability. Reduced cycling and strict annualized failure rate (AFR) standards ensure dependable performance, while decreased tune-point dithering supports process stability and precision. Conventional matching network tuning Navigator® II matching network tuning M inimal hunting, taking a nearly straight li

NAVIGATOR® II DIGITAL MATCHING NETWORKS Advanced Tune-While-Pulse Capabilities The use of RF-plasma pulsing to control ion energy is key to the development of precise, state-of-the-art etch and deposition processes. The Navigator II Matching Network’s new input sensor and corresponding tune algorithm allow precision tuning during pulsed-RF conditions up to 20 kHz and with duty cycles between 10 and 90%. Conventional matching network “Classic” tuning methods can cause instability. Navigator® II matching network: Advanced algorithms allow for active tuning during a pulse. Increased stability I...

Streamlined Design The Navigator II matching network’s innovative design integrates the high-technology sensor with the microprocessor, and along with advanced proprietary tuning algorithms, provides developers the necessary tools to realize process-enabling benefits. Customers gain access to critical process information through various available serial and analog I/O interfaces, including RS-232, Profibus, Ethernet, and DeviceNet® interfaces. Real-Time Measurement, Analysis, and Control Optional Virtual Front Panel (VFP) AE’s VFP software enables you to monitor and command the matching network...

ABOUTADVANCED ENERGY Advanced Energy (AE) has devoted more than four decades to perfecting power for its global customers. AE designs and manufactures highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. AE’s power solutions enable customer innovation in complex semiconductor and industrial thin film plasma manufacturing processes, demanding high and low voltage applications, and temperature-critical thermal processes. With deep applications know-how and responsive service and support across the globe, AE builds collaborative...