LUXTRON M-1100 FLUOROPTIC TEMPERATURE CONVERTER = Fiber optic temperature sensing for semiconductor in etch and deposition applications The Advanced Energy's Luxtron® M-1100 is the latest FluorOptic® thermometry (FOT) converter platform, featuring an advanced light source and improved ultralow noise electronics. Two new proprietary phosphor formulations VioLuxTM and RubiLuxTM have been developed to deliver 0.5°C accurary, repeatability, and stability over an extended range -200 to 450°C. PRODUCT HIGHLIGHTS  Measurement range from -200 to 450°C to support advanced etch processes  Advanced low-noise electronics and algorithms give precision better than 0.05°C  AccuDisc™ sensors enable sensor to be separate from the probe enabling greater accuracy and repeatability  Experienced team to support custom probe development for OEMs  Compact, DIN-rail size to minimize footprint when integrated into tools and equipment  Immune to electromagnetic interference from EMI, RF, high voltage and microwave sources TYPICAL APPLICATIONS  Plasma etch, electrostatic chuck temperature  Plasma etch, dielectric window or chamber lid temperature  Microwave heating  PEALD, PECVD electrostatic chuck

Luxtron M-1100 FluorOptic Temperature Converter The complete Luxtron M-1100 series system consists of the electronics module assembly plus probes. The probes are often custom developed. The system uses FluorOptic® technology, based on a temperature sensitive phosphorescent sensor attached to the end of an optical fiber. The M-1100 use the principles of phosphorescence to provide a wide measurement temperature range with high-accuracy temperature monitoring for critical semiconductor applications. Custom OEM probe design and quick-turn prototypes are offered by Advanced Energy’s experienced engineering...

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ABOUT ADVANCED ENERGY Advanced Energy (AE) has devoted more than three decades to perfecting power for its global customers. AE designs and manufactures highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. AE’s power solutions enable customer innovation in complex semiconductor and industrial thin film plasma manufacturing processes, demanding high and low voltage applications, and temperature-critical thermal processes. With deep applications know-how and responsive service and support across the globe, AE builds collaborative...