RF POWER DELIVERY SYSTEMS ANGSTROM-ERA PRECISION POWER

eVerest™ RF POWER DELIVERY SYSTEMS Angstrom-Era Precision Power

eVerest™ RF Power Delivery Systems As the semiconductor industry speeds toward a new inflection, the eVerest™ RF generator fills the need for transformational plasma control. eVerest’s configurable multi-level pulsing enables instantaneous or user-defined transition timing. Additionally, high-speed, high-accuracy model-based frequency tuning with wide frequency sweep range provides greater process stability and control. These capabilities, plus faster setpoint response, controlled overshoot at the beginning of pulsing states, and sophisticated PowerInsight by Advanced Energy™ IoT intelligence...

eVerest™ RF POWER DELIVERY SYSTEMS Speed and Control within Programmable Pulse Profiles Dynamically control multi-level pulsing. Access new energy regimes and distributions. Eight-level pulsing Achieve reliable ignition. Maintain plasma in processes with longer off pulse states. FORWARD POWER

eVerest™ RF POWER DELIVERY SYSTEMS Power/Frequency Ramp Frequency Edge Ramp Mitigate transients. Enhance process stability. Configure performance Power Edge Ramp during transitions into unstable process regions. Pulsing Rise/Fall Times Fast Rise/Fall Times Pulsing Rise/Fall Times Increase etch and deposition rates with instantaneous pulsing. Setpoint Change Rise/Fall Times < 200 µs Setpoint Change Rise/Fall Times < 200 µs Time, µs

Over 20 Years of Full RF Systems eVerest™ RF POWER DELIVERY SYSTEMS Advanced Energy has offered full RF delivery systems for over 20 years, with multiple options for matching solutions and intelligent SyncTech™ synchronization. RF Plasma Generators RFG Digital/Analog APEX® Digital/Analog RF Match Networks Navigator® All Digital 6

eVerest™ RF POWER DELIVERY SYSTEMS eVerest™ eVerest™ Accelerated Digital Accelerated Digital Control Control Paramount® Paramount® Paramount®+ Paramount®+ eVos™ eVos™ Higher Density Higher Density Digital Control Digital Control Tunable Ion Energy Tunable Ion Energy Navigator® IIII Navigator® Navigator® IIII Navigator® Navigator® IIII FastCap Navigator® FastCap Model-Based Model-Based Model-Based Model-Based Solid State Match Solid State Match adva

eVerest™ RF POWER DELIVERY SYSTEMS Data Ecosystem The eVerest™ RF power supply’s embedded or system-level IOT platform offers a leap ahead in data collection, resolution, visualization, and analysis. BENEFITS ■ Reduced “No Problem Found” returns and faster troubleshooting turnaround ■ Reduced need to open chamber to install an oscilloscope ■ Continuous, long-term data collection ■ Plug-and-play operation ■ Actionable insights and data-driven decision making ■ Cybersecurity FEATURES ■ Auto-reconnect after generator power cycle ■ Configurable onboard oscilloscope data recording in nanoseconds for...

eVerest™ RF POWER DELIVERY SYSTEMS WORLDWIDE PRODUCT AND APPLICATION SUPPORT AE field service engineers support your on-site needs, including installation, commissioning, set up, inspection, and more. AE field applications engineers conduct on-site reviews and consultations to solve challenges and enhance process efficiency and productivity. AE service centers are located around the world and provide the highest quality repairs to maximize uptime and reduce total cost of ownership.

eVerest™ RF POWER DELIVERY SYSTEMS

Advanced Energy ABOUTADVANCED ENERGY Advanced Energy (AE) has devoted more than four decades to perfecting power for its global customers. AE designs and manufactures highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. AE’s power solutions enable customer innovation in complex semiconductor and industrial thin film plasma manufacturing processes, demanding high and low voltage applications, and temperature-critical thermal processes. With deep applications know-how and responsive service and support across the globe,...