ASCENT AMS DC POWER SUPPLIES ® STABLE POWER DELIVERY THROUGH EXTREME ARC CONDITIONS FOR HIGHLY REPEATABLE FILMS ©2019 Advanced Energy Industries, Inc.

Ascent AMS DC Power Supplies As manufacturing techniques advance, new materials and cathode designs pose greater challenges to process stability and film repeatability. Ascent® AMS power supplies deliver stable, repeatable power, regardless of process material or cathode design. Benefits ■ High film quality and throughput ■ Reduced film, substrate, and equipment damage ■ Stable throughput and power delivery under extreme arcing conditions ■ Easy integration and control Features ■ Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets ■ Set Point Compensation™...

Industry-Leading Arc Management Many insulative target materials used in magnetron PVD processes produce up to thousands of arcs per second — a level that requires more than the rudimentary detection and handling that conventional arc management provides. With three key innovations — Arc Management System™ technology, Set Point Compensation™ technology, and Arc-Sync technology — Ascent AMS power supplies enable the use of new target materials, with reduced film and equipment damage, stable throughput, and the ability to synchronize the arc responses of connected units. Arc Management System Technology...

For use with multiple-cathode systems, Arc-Sync technology coordinates the arc responses of up to 12 connected Ascent AMS units (up to 720 kW). Main Unit Arc-Sync™ Control Cathodes Main/Satellite General Specifications Ascent AMS 30 kW

Set Point Compensation Technology ™ Ascent AMS power supplies feature a patented algorithm that improves power-delivery repeatability and maintains sputter rate by automatically adjusting power output to compensate for arc shutdowns. Power Delivery Over Time Instantaneous Power WITHOUT SPC Instantaneous Power WITH SPC

Advanced Energy For international contact information, visit advancedenergy.com. [email protected] +1 970 221 0108 about advanced energy Advanced Energy (AE) has devoted more than three decades to perfecting power for its global customers. AE designs and manufactures highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. AE’s power solutions enable customer innovation in complex semiconductor and industrial thin film plasma manufacturing processes, demanding high and low voltage applications, and temperature-critical...