Apex 3k5PIN Conversion Conversion to Apex 3k5PIN provides 32 different operating pin positions The Advanced Energy (AE) Apex® 3k2PIN is a 3 kW 13.56 MHz RF generator with a pin diode matching network capable of operating in a few different impedance zones. This versatile generator is known for its power delivery consistency, high power density, and exceptional reliability. However, with only two pin diodes, the impedance matching network is limited to four pin positions. BENEFITS Cost effective approach to enhancing performance compared to new generator/match combination Increased impedance matching range for improved tuning of custom processes Converted unit is transparent from an operational standpoint In order to expand the available tuning range of the Apex and provide improved process control for a wide variety of applications, a conversion kit was developed to add additional pin diodes to the existing Apex 3k2PIN. By converting to a 3k5PIN, the same Apex unit is now capable of operating in 32 different pin positions, covering a much larger impedance range than before. Flexible conversion kits, each with four pre-programmed pin positions, allow custom impedance range selection while maintaining compatibility with existing tool software Optional graphical user interface provides on-site selection of pin positions to optimize the impedance range to each customer process position ©2020 Advanced Energy Indust

Apex 3k2PIN vs. 3k5PIN approximate impedance range over all pin positions The power profile shown here illustrates the expanded impedance range available with the 3k5PIN. The converted unit can deliver full power (3000 W) at more impedance points across the spectrum. Seamless Transition The converted unit is designed to drop back into the existing configuration and work seamlessly within the tool’s control scheme. Conversion Summary All modifications to the unit are located within the impedance matching network, with no changes to the RF drive circuitry. Besides the ability to custom tune to...

Advanced Energy For international contact information visit advancedenergy.com. [email protected] +1.970.221.0108 ABOUT ADVANCED ENERGY Advanced Energy (AE) has devoted more than three decades to perfecting power for its global customers. AE designs and manufactures highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. AE’s power solutions enable customer innovation in complex semiconductor and industrial thin film plasma manufacturing processes, demanding high and low voltage applications, and temperature-critical...