ASCENT AMS DC POWER SUPPLIES
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Catalog excerpts

ASCENT AMS DC POWER SUPPLIES - 1

ASCENT AMS DC POWER SUPPLIES STABLE POWER DELIVERY THROUGH EXTREME ARC CONDITIONS FOR HIGHLY REPEATABLE FILMS Input Power 400, 440 or 480 VAC (±10%), 50/60 Hz Output Power 30, 40 or 60 kW Output Voltage Up to 1000V Ignition Voltage 800 to 1200V ©2019 Advanced Energy Industries, Inc.

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ASCENT AMS DC POWER SUPPLIES - 2

Ascent AMS DC Power Supplies As manufacturing techniques advance, new materials and cathode designs pose greater challenges to process stability and film repeatability. Ascent® AMS power supplies deliver stable, repeatable power, regardless of process material or cathode design. Benefits ■ High film quality and throughput ■ Reduced film, substrate, and equipment damage ■ Stable throughput and power delivery under extreme arcing conditions ■ Easy integration and control Features ■ Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets ■ Set Point...

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ASCENT AMS DC POWER SUPPLIES - 3

Arc Management System Technology ™ AE’s proprietary AMS technology preserves film quality and repeatability, even under extreme arcing conditions. These enhanced arc handling capabilities enable success with newer materials, such as AZO and IGZO. A utomatic arc handling eliminates need to adjust arc management parameters P rimary arc response quickly removes power from arcs S econdary arc response cools surface and quenches secondary arcs C ontrolled power recovery minimizes over-shoot and secondary arcs L ow stored energy — less than 0.4 mJ per kW—reduces arc impact on the process Voltage...

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ASCENT AMS DC POWER SUPPLIES - 4

For use with multiple-cathode systems, Arc-Sync technology coordinates the arc responses of up to 12 connected Ascent AMS units (up to 720 kW). Master Unit Arc-Sync™ Control Cathodes Master-Slave General Specifications Ascent AMS 30 kW

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ASCENT AMS DC POWER SUPPLIES - 5

Set Point Compensation Technology ™ Ascent AMS power supplies feature a patented algorithm that improves power-delivery repeatability and maintains sputter rate by automatically adjusting power output to compensate for arc shutdowns. Power Delivery Over Time Instantaneous Power WITHOUT SPC Instantaneous Power WITH SPC

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ASCENT AMS DC POWER SUPPLIES - 6

Advanced Energy For international contact information, visit advancedenergy.com. sales.support@aei.com +1 970 221 0108 ABOUT ADVANCED ENERGY Advanced Energy (AE) has devoted more than three decades to perfecting power for its global customers. AE designs and manufactures highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. AE’s power solutions enable customer innovation in complex semiconductor and industrial thin film plasma manufacturing processes, demanding high and low voltage applications, and...

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