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- Adenso Industrial Services GmbH
- Wafer Handling Robot
Wafer Handling Robot
Wafer Handling Robot
- Range: Offers the largest travel ranges for maximum flexibility.
- Payload: Provides the highest load capacity, allowing for unlimited substrate choices.
- Gate Valves: Features smart kinematics for the smallest gate valves.
- Footprint: Space-saving kinematics result in a small setup area.
- Complexity: Simplified design with Adenso saves space and money.
- Working Ranges: X-axis up to 5m; Z-axis options at 0, 50, 100, and optionally up to 500 mm.
- Payload: Starts from 1 kg up to 25 kg, with heavy-duty options up to 250 kg.
- Clean Room Suitability: Suitable for clean rooms up to ISO class 3 / US FED class 1.
- Safety Features: Includes SBC safe brake control and STC safe tension control.
- Vacuum Range: Base pressure at 5x10-7 mbar, with an option for double sealing.
- Interfaces: Supports Ethernet, EtherCAT, and Profibus, with teaching software available.
Adenso GmbH, Zur Wetterwarte 27, 01109 Dresden, Germany
Phone: +49 351-79 59 79 7-0, Fax: +49 351-79 59 79 7-70
Email: [email protected], Website: www.waferhandling.solutions
Catalog excerpts
Wafer Handling Robot high vacuum type process chamber 3 vacuum competitor's limit ultra large ADVANTAGES:✓ RANGE Largest travel ranges = maximum flexibility. ✓ PAYLOAD Highest load capacity = unlimited substrate choice. ✓ GATE VALVES Smart kinematics = smallest gate valves. ✓ FOOTPRINT Space-saving kinematics = small set up area. ✓ COMPLEXITY Keep it simple with Adenso = save space and money!
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Wafer Handling Robot LARGE / EXTRA LARGE / ULTRA LARGE Adenso solutions you need PAYLOAD starts from 1 kg up to 25 kg CLEAN ROOM clean room suitability SAFETY SBC safe brake control STC safe tension control VAKUUM RANGE base press.: 5x 10-7 mbar option: double sealing INTERFACES Ethernet, EtherCAT, Profibus teaching software Adenso GmbH Zur Wetterwarte 27 01109 Dresden Germany [email protected] www.waferhandling.solu:ons
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