Wafer Handling Robot high vacuum type process chamber 3 vacuum competitor's limit ultra large ADVANTAGES:✓ RANGE Largest travel ranges = maximum flexibility. ✓ PAYLOAD Highest load capacity = unlimited substrate choice. ✓ GATE VALVES Smart kinematics = smallest gate valves. ✓ FOOTPRINT Space-saving kinematics = small set up area. ✓ COMPLEXITY Keep it simple with Adenso = save space and money!

Wafer Handling Robot LARGE / EXTRA LARGE / ULTRA LARGE Adenso solutions you need PAYLOAD starts from 1 kg up to 25 kg CLEAN ROOM clean room suitability SAFETY SBC safe brake control STC safe tension control VAKUUM RANGE base press.: 5x 10-7 mbar option: double sealing INTERFACES Ethernet, EtherCAT, Profibus teaching software Adenso GmbH Zur Wetterwarte 27 01109 Dresden Germany [email protected] www.waferhandling.solu:ons