LGR-ICOS 927S Industrial trace gas analyzers Sensitive, accurate and reliable gas analysis by patented OA-ICOS Measurement made easy — LGR-ICOS 927S performance analyzer The LGR-ICOS™ industrial trace gas analyzer was designed to perform to the most demanding of our customers’ requirements with the highest sensitivity, accuracy, precision and response times: • Leak detection for personnel safety • Airborne contamination monitoring • Front Opening Unified Pod (FOUP) and vapor deposition chamber monitoring • Regulatory-compliant emissions and stack gas monitoring • Available in single or multi-gas configurations of HF, HCI, NH₃ • All LGR-ICOS Model 927S analyzers also report accurate and precise H₂O measurements • 0 to 5 V and analog 4 to 20 mA outputs standard and Modbus optional • Optimized data processing for best performance in measuring sub-ppb concentrations • Primary password protection for analyzer and data security • Customizable Calibration & Performance Certification document packages available • Touchscreen digital display for gas concentration and analyzer status • Optimized zero-air performance for re

— Introduction The LGR-ICOS trace gas analyzers provide sensitive measurements of hydrogen fluoride, hydrogen chloride, ammonia and water vapor (for other gases, please inquire) in ambient air or in industrial process flows with extremely high precision and sensitivity. With optimized performance for semiconductor applications in leak detection, airborne contamination monitoring, FOUP monitoring and stack gas emissions, this series of analyzers will report measurements over a wide range of concentrations with unsurpassed stability, accuracy and consistency in analyzer-to-analyzer performance....

LGR-ICOS 9 27S INDUSTRIAL TRACE GAS ANALYZERS | DS/LGR/927S-EN REV. C Item (gases) data acquisition data acquisition <0.035 ppb (100 s) <0.025 ppb (100 s) <5 ppm (100 s) 0.1 ppb @ 100 s 0.075 ppb @ 100 s 25 ppm @ 100 s data acquisition data acquisition data acquisition Accuracy (of reading) @ concentrations of: (of reading) @ concentrations of: = ±10 % <2 ppb ±0.2 ppb Measuring range Sample flow rate (lpm) Calibration period Time required for calibration Response time (T90, T10) Measuring principle Data rate (user selectable) Mean Time Between Failures (MTBF) Ambient temperature Ambient...

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