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Atmospheric door L-VAT

Atmospheric door L-VAT
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Atmospheric door L-VAT Series 075 Transfer door-valve for SEMI applications For operation in atmospheric pressure, e. g. load lock chambers No vacuum seals on actuator Virtually particle and vibration free L-motion Gate material aluminum or stainless steel Aluminum double acting pneumatic actuator with position indicator Ordering numbers type U with solenoid for impulse actuation: 075 . . - . A44 (specify control voltage) Additional opening sizes: see «Options» Stainless steel double acting pneumatic actuator with position indicator Ordering numbers type U with solenoid for impulse actuation: 075 . . - . E44 (specify control voltage) Additional opening sizes: see «Options»

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Series 07 Door types C Mounting surface of actuator body perpendicular to door opening Actuator body mounted on chamber wall L-VAT configuration (see glossary) Vulcanized gate seal (see glossary) Pneumatically locked in closed position, even without compressed air supply Sealing material Actuator: - Solenoid for impulse actuation 24 V DC - Position indicator with electro-magnetic sensors and LED display - Actuator cover kit to cover the pistons and cylinders of the actuator Gate: - Gate seal O-ring - Different opening sizes: 37 x 336 / 435 / 510 mm (gate seal vulcanized) 51 x 160 / 210 /...

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Atmospheric door L-VAT Technical data Leak rate: gate Pressure range Differential pressure on the gate - in closing direction - in opening direction Differential pressure at opening Cycles until first service operating temperature of valve configurations valve gate position indicator stainless steel actuator solenoid Material - Gate: aluminum - Gate: stainless steel Seal: gate Mounting position conditions and sealing materials quick connect fittings for pneumatics for tubing O.D. 4 mm R ⅛" internal thread Position indicator: contact rating - Voltage - Current - Power - Connection Maximum...

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