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BDS Series of PPB Trace Oxygen Analyzers

BDS Series of PPB Trace Oxygen Analyzers
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BDS Series of PPB Trace Oxygen Analyzers - 1

ANALYTICAL INSTRUMENTS -DOtentiostat Drivei

BDS Series of PPB Trace Oxygen Analyzers - 2

s the density of wafers produced within a semiconductor facility increases, so does the stringent requirement to accurately monitor for oxygen contamination at or below parts-per-billion (ppb) levels. Oxygen contamination is routinely monitored in the ultra-high purity (UHP) bulk gases such as nitrogen, argon, helium and hydrogen, which are used as blanket or carrier gases during the vapor deposition, sputtering and annealing processes. The ingress of oxygen at any point during the wafer fabrication process will have a detrimental effect on product yields. Therefore, it is imperative for...

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BDS Series of PPB Trace Oxygen Analyzers - 3

SENSOR BAFFLE MECHANISM Teledyne's unique, patent-applied-for mechanism within the BDS sensor minimizes sensor downtime when water is added. • Three user-programmable ranges which can be tailored to the application needs in either a fixed or auto-ranging analysis mode • Auto-calibration software • RS-232C bi-directional serial interface as well as 4-20 mA and 0-1 VDC concentration output signals • Self-diagnostics and system failure alarm along with 2x fully adjustable concentration alarm set points • low inlet sample pressure furnace-type applications, the BDSFor 3000 can also be...

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BDS Series of PPB Trace Oxygen Analyzers - 4

BDS SERIES OF PPB OXYGEN ANALYZERS SPECIFICATIONS Ranges: Three user programmable ranges Default ranges: Over-range is not user programmable ±2% of full scale at constant temperature ± 5% of full scale over entire operating temperature range Detection method: Bi-potentiostat Driven Sensor (BDS) Technology (replenishable, non-depleting type) Operating temp range: 5 to 40° C Lower detection limit: Response time: 90% in less than 60 seconds 4-20 mADC isolated percent of range output 0-1 VDC percent of range output and range ID output Auto-calibration software: Standard; the frequency of the...

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