ZS Series
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2D CMOS Laser Type High-precision Displacement Measurement Sensors Bringing Smart Sensors into New Fields.

ZS-HL Series Highly Advanced Sensing Fu Very High-performance Sensors that Support Core Quality from Very Long-range to Extremely Precise Measurements Range of models with measuring center distance of 20 to 1,500 mm. Achieves maximum resolution of 0.25 µm. Maximum response speed of 110 µs. Parallel output supported. Measuring center distance Record Data Storage Unit ZS-DSU ZS-DSU Enables full application of Sensor Controller information. Enables onsite high-speed logging of data in external memory (compact flash card) for the Sensor Controller or Multi-Controller. Effective for building...

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Smart Sensor Advanced technology is carried Business card size +XX-XX-XXX-XXX +XX-XX-XXX-XXX High-performance Sensors nctions in a Compact Package More P.14 Standard Sensors Standard Sensors Most Suitable for a Variety of High-precision Displacement Measurements, Including Spot Detection, Wide-range Detection, and Long-distance Detection. Measuring center distance Expansion Units Beam Shapes Spot and line beam selection. Wide Range of Products Long-range, middle-range, and short-range models. Diffuse Reflective Sensors Sensor Controllers ZS-HLDC/LDC Enable maximum sensing performance with...

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Main Applications High Performance ZS-HL Series Very High-performance Sensors that Support Core Quality from Very Long-range to Extremely Precise Measurements Sealer coating Ideal for measuring the thickness of silicone or compound semiconductor wafers in polishing and testing processes. Ideal for measuring the potting resin height for electronic components. Ideal for measuring liquid gasket (FPIG) application amounts. Prevents defects such as insufficient seal. Ideal for confirming positioning and repeatability accuracy of XY stages. Ideal for level detection for liquid crystal coaters and...

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Advanced technology is carried Applications by Industry Automobile and Automotive Parts Measuring Car Bodies Measuring Door Attachment Offsets Electronic Components Measuring Tire Exteriors Inspecting Board Heights Inspecting for Board Coplanarity Measuring Shape for Positioning Laminated Ceramics 1 axis scan Capacitor PCB SmartMonitor graph screen Spot beam Line beam Semiconductors Measuring Electrode Thickness on Compound Semiconductors Household Appliances and Audio-visual Measuring Wafer Warping and Thickness LCDs and PDPs Measuring Glass Undulation Simultaneous Measuring of Touch Panel...

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High-performance Sensors High grade High-performance Sensors ZS-HL Series Product Lineup 2D CMOS High-end Displacement Sensors Advanced sensing technology packed into the best Sensor Head for the highest sensing precision Wide lineup of products from 0.25 µm high-resolution models to 1,500 mm long-range models. Measuring center distance 1500±500 mm Resolution 500 µm Linearity ±0.2%F.S. Beam shape 1.5 mm × 40 mm

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Advanced technology is carried 2D CMOS Laser Image Sensing Element Very high resolution The three basics of sensing precision, speed, and sensitivity - can be balanced because ideal measurement settings can be made for light reception area. Digital Sensing Totally reliable measurements with completely digital sensing. High-performance Sensors All Models Are Class 2 Lasers. High Resolution at 0.001 µm (ZS-LD10GT) OMRON's digital sensing technology achieves unbelievably high resolution. (ZS-HLDS2T) Unique OMRON algorithms reduce Extreme stability detection error to improve workpiece...

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High-performance Sensors High grade High-performance Sensors Reduced Variation in Linearity between Different Objects, and Linearity Determines Measurement Accuracy. Makes it easier to introduce a variety of detection objects. Detect Essentially Any Object Measuring Car Body Widths Linearity Characteristic Model Measuring center distance Resolution Linearity Beam shape Specified range Beam shape Previous OMRON models Regular reflection 0.15 Specified range Model Measuring center distance Sample-A Sample-B Sample-C Sample-D Sample-E Note: Typical examples Manage trends by measuring widths of...

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Advanced technology is carried High-performance Sensors Ideal for Measuring the Height and Thickness of Transparent Objects Tilted and moving workpieces can also be stably measured. Resolution Linearity Beam shape Aspherical lens (newly developed) Limit angle ( ) Model Measuring center distance A special aspherical lens was developed for the ZS-HLDS2VT, and the design of the optical structure was optimized for regular-reflective workpieces. This has greatly increased the allowable degree of tilt and improved stability for measuring transparent and regularreflective workpieces. Previous...

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High-performance Sensors High grade High-performance Sensors The Only Way to Very High-precision Measurements Superior Features for Semiconductor Wafer, Glass, and Other Measurements Requiring Precision Slim 26. 4m m Simultaneous Measuring of Touch Panel Film Thickness and Gap Measuring center distance Resolution Linearity Beam shape Film Glass Simultaneous measurement of transparent object thickness and gap An unbelievable stationary measurement precision of 0.25 µm, the highest in this product class. Ideal for Measuring Nozzle Gaps! Model Measuring center distance Resolution Linearity...

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Advanced technology is carried High-performance Sensors Technology With OMRON's sensing technology and newly developed algorithms, stable, high-precision measurement is possible of workpieces that were difficult to measure using laser displacement meters due to laser light penetration, transmission, excessive reflection, or insufficient light. Mechanisms for Stable Measurement Patent Pending Mechanisms for Stable Measurement Patent Pending Mechanisms for High Resolution Patent Pending No more errors due to reflection coefficients between glass gaps No more errors due to workpiece reflection...

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High-performance Sensors High grade High-performance Sensors Sensor Controllers ZS-HLDC (Multitasking) Enables maximum sensing performance with fully digital processing and multitasking functions. A controller the size of a business card filled with OMRON's leading-edge digital technology. Enables easy utilization of the ultimate in measurement performance. High-performance Sensing Simultaneous Measurement and Output of Up to 4 Features For detection of small recesses and protrusions in measurement location When simultaneous measurement of distance to glass, glass thickness, gap, etc.,...

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