M330 Hds
1 / 4ページ

Flow Measurement & Control Type M330H & M330AH HEATABLE MASS FLOW CONTROLLER FOR HIGH TEMPERATURE APPLICATIONS UP TO 150°C MKS Instruments has been at the forefront of developing instrumentation for the delivery of low vapor pressure materials. The M330H and M330AH provide two additional choices for the neat delivery of high boiling materials. The maximum operational temperatures of these devices are 80° and 150°C respectively, allowing direct flow control of low vapor pressure materials with thermal MFCs, without the need for a carrier gas. Features & Benefits • Rated for temperatures up to 150°C (M330AH) • Full scale flowrates from 10 to 40,000 sccm N2 equivalent • Heatable flowbody connected to remote ambient temperature electronics by a 2 meter high temperature cable • Patented flow sensor and sensor/ bypass/valve assembly for stable flow over widely varying conditions (US Patents 5410912, 5295394, and 5727769) • Corrosion resistant, metal-sealed flow- body • PTFE Valve Plug • CE Compliant • CVD Materials Delivery: DiEthyl Zinc, TriMethyl Phosphate, DecaBorane • Coating Applications: Titanium TetraChloride, Titanium i-Propoxide • Cleaning Processes: Water Vapor delivery • Fiber Optics Manufacture: Germanium TetraChloride, Silicon TetraChloride delivery • Effluent Testing and Monitoring

Operating Environment Both the M330H and M330AH are calibrated for specific materials and processes. Therefore, it is highly recommended that they be operated in a constant temperature environment to ensure accurate flow measurement and/or prevent condensation of vapors in the MFC or connected piping. Specifications Performance Full Scale (N2 equivalent) Operating Temperature A customer specified temperature (Max 80°C) A customer specified temperature (Max 150°C) Consult factory over 150°C Control Range Normal Operating Pressure 10-5000 sccm (N2 equivalent) Calibration Accuracy Temperature...

Dimensional Drawings Dimensions, mm Flow Range (1) Note: (1) N2 equivalent at standard conditions (760 Torr, 0°C) Electrical Interf ace D-sub 9 Pin Connector (male) Pin No. Description, Signal Valve Open/Close Input (1) Flow Rate Output Signal (0 to +5VDC) Power Supply +15 VDC Input (2) Power Common Power Supply -15 VDC Input (2) Flow Rate Set Point Input (0 to +5 VDC) Signal Common Signal Common Optional Signal Input (3) Notes: (1) Valve open: connect pin 1 to +15VDC Valve close: connect pin 1 to -15VDC (2) Connect to proper power source. Requires at least 120mA/MFC channel with acceptable...

Ordering Inf ormation Please contact MKS Applications Engineering with the following information to determine the correct MFC for the application: Material to be delivered, Maximum Flow Rate, Source Temperature, Source Pressure, Process Temperature, and Process Pressure. Typical Schematic for CVD Materials Delivery, Coating Applications, Cleaning Processes and Fiber Optic Manufacture Typical Schematic for Effluent Testing and Monitoring Global Headquarters 2 Tech Drive, Suite 201 Andover, MA 01810 Tel: 978.645.5500 Tel: 800.227.8766 (in USA) Web: www.mksinst.com M330H_AH - 8/12 © 2007 MKS...