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MFA Series Miniature Linear Stages

MFA Series Miniature Linear Stages
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807 Email: sales@newport.com • Web: newport.com M o t o r i z e d P o s i t i o n i n g TECHNICAL REFERENCE MOTORIZED LINEAR STAGES MOTORIZED ROTATION STAGES MOTORIZED OPTICAL MOUNTS MOTORIZED ACTUATORS CONTROLLERS AND AMPLIFIERS SYSTEMS MFA Series Miniature Linear Stages • 25 mm travel in a low-cost and compact design • All-steel construction provides exceptional load capacity and stiffness • Precision-ground, double-row linear ball bearings ensure ultra-smooth and accurate linear travel • High-resolution, encoder feedback enables ultra-smooth motion with 100 nm sensitivity • Vacuum-compatible versions to 10-6 hPa. Designed for space-limited applications and compact multi-axis assemblies, MFA Series linear stages supply very high resolution, single-axis translation in a low-cost, motorized package. Typical applications for this stage are fiber optic alignment, laser diode research, bio-medical applications and inspection systems. MFA linear stages are available in two versions: The MFA-CC DC-motor features an integrated gear-box and a motor-mounted high resolution 2,048 cts/rev rotary encoder. The high-resolution position feedback and low-friction mechanical design ensures ultra-smooth motion with 100 nm sensitivity. The DC motor supplies an optimized output torque that permits the use of a lower ratio step-down gear allowing for faster motion with higher reliability and lower backlash. Hence, the MFA-CC is the recommended choice for applications that require small incremental motion with high dynamic speed range and good repeatability. The MFA-PP stepper motor version is a more economic solution for less demanding applications and is direct compatible with our NSC200 motion controller. End-of-run limit switches prevent bearing damage from accidental over-travel. MFA stages feature an all-steel construction that provides a higher stiffness-to-weight ratio and lower thermal expansion compared to aluminum designs. The result is superior performance in a smaller footprint. The smooth motion of the MFA linear stages is further accentuated by Newport's proprietary double-row linear ball bearing design with bearing ways that are directly machined into the structural eframe of the stage. Compared to alternative solutions that use commercial bearings, MFA linear stages offer a higher load capacity and stiffness with low pitch and yaw errors. Another benefit of Newport's integrated bearing ways is the availability of 4 widely spaced mounting holes for base mounting and XY-assemblies. This provides better stress distribution and allows for more rigid multi-axis combinations than other designs that provide only a line contact with 2 mounting holes. Design Details Base Material Stainless steel Bearings Double row linear ball bearings Drive Mechanism Backlash compensated leadscrew Drive Screw Pitch (mm) 0.5 Reduction Gear MFA-CC: 1:14 MFA-PP: 1:43 Feedback MFA-CC: Motor mounted rotary encoder; 2,048 cts/rev MFA-PP: None Limit Switches Mechanical switches Origin Uses motor side limit for homing, typically <4 ìm repeatability Motor MFA-CC: DC servo motor UE1724SR MFA-PP: 2-phase stepper motor UE16PP, 1 full step = 0.485 ìm Cable (m) 1.5 Vacuum Compatibility Vacuum compatible versions are available up to 10-6 hPa using DC motor (MFA-CCV6) Specifications MFA-PP MFA-CC Travel Range [in. (mm)] 1 (25) Resolution (ìm) 0.00757** 0.0175 Minimum Incremental Motion (ìm) 0.1 0.1 Uni-directional Repeatability (ìm) 0.25 typical, 0.5 guaranteed 0.18 typical, 0.3 guaranteed Bi-directional Repeatability (ìm) 1 typical, 2.5 guaranteed 0.6 typical, 2 guaranteed On-Axis Accuracy (ìm) 3 typical, 8 guaranteed Maximum Speed (mm/s) 0.3 2.5 Pitch (ìrad) 80 typical, 200 guaranteed Yaw (ìrad) 60 typical, 100 guaranteed MTBF 10000h at a 1kg load with a 20% duty cycle Weight [lb (kg)] 1.3 (0.6) 1.3 (0.6) * After backlash compensation ** Equals 1/64 of a full step See the Motion Control Metrology Primer section (see page 775) for more information on typical and guaranteed specifications

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808 Phone: 1-800-222-6440 • Fax: 1-949-253-1680 M o t o r i z e d P o s i t i o n i n g MOTORIZED ROTATION MOTORIZED LINEAR STAGES TECHNICAL REFERENCE STAGES SYSTEMS CONTROLLERS AND AMPLIFIERS MOTORIZED ACTUATORS MOTORIZED OPTICAL MOUNTS Dimensions MFA-CC and MFA-PP 1.89 (48) .87 ±.49 (22 ±12.5) 1.42 (36) .79 (20) 5.51 (140) .79 (20) 1.42 (36) .79 (20) .39 (10) .98 (25) 1.42 (36) 1.77 (45) CABLE LENGTH 59 (1.5 M) 4 TAPPED HOLES, 4-40 (M3) CLR 4 HOLES M2 THD, USABLE DEPTH: .12 (3) 2 HOLES M3 THD, USABLE DEPTH: .20 (5) 6 HOLES M3 THD, USABLE DEPTH: .20 (5) MFACC: 25-PIN SUB-D CONNECTOR MFAPP:...

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