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High performance laser Fizeau phase-shifting interferometer with rapid data acquisition for use in production environments that are prone to vibrations. Includes proprietary algorithms that eliminate vibration induced fringe ripple, FlashPhase software
, and precision interface for rail accessories. Vibration Correction
Non- correctedCorrected

GPI PE - 18003 S

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EQUIREMENTS Measurement Capability Measures surface form of reflective materials and optics, and transmitted wavefront of transparent optics. Provides accurate surface metrology in stable and vibration-prone environments. Measurement Technique Laser-based, three-dimensional, mechanical phase-shifting interferometry and carrier-fringe interferometry (FlashPhase Power 100 to 240 VAC, 50/60 Hz Compressed Air 80 psi (5.5 bar); dry and filtered source (for optional vibration isolation)

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NVIRONMENT (6) Temperature 15 to 30°C (59 to 86°F) Rate of Temp. Change <1.0°C per 15 min Humidity 5 to 95% relative, noncondensing Vibration Isolation Vibration error suppression effectiveness depends on the vibration frequency and amplitude. A passive isolation system is recommended when using mechanical phase-shifting acquisition.
(1) ) Test Beam Diameter 4 inch (102 mm) or 6 inch (152 mm) Mounting Options Horizontal or Vertical Optical Centerline 4.25 in. (108 mm) Alignment System Quick Fringe Acquisition System (QFAS) with twin spot reticle Zoom Range 1:6X Alignment Field of View 4 inch: ±3 degrees 6 inch: ±2 degrees Pupil Focus Range 4 inch:±2.5 m 6 inch:±5.5 m Computer and Software High-performance Dell PC with dual monitors and ZYGO MetroPro™ software

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HARACTERISTICS Material Various; glass, super-finished metals, ceramics, and plastics Preparation None; measurements are noncontact, nondestructive, and performed under ambient conditions Reflectivity 0.1% to 100% (based on transmission element)

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ERFORMANCE (2)

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PTIONS Repeatability of
Three-Flat Test (3)
(4)
See the GPI and VeriFire Accessory Guide , OMP-0463 for a complete listing of available options. Notations (5) 180 fringes Acquisition Time 62 ms (13 data frames) Resolution Better than /8,000 (double-pass) Digitization 8 bits
1 For FlashPhase acquisition the minimum camera exposure time that can be set is 20 microseconds. Exposure time is cavity reflectivity dependent; high reflective parts allow shorter exposure time than low reflective parts. 2 Performance qualified in lab environment with the temperature set point between 20-23°C. 3 Repeatability of the three-flat test is an in-use example of performance in a controlled environment with a rate of temperature change less 0.1 °C per hour. Flat ‘A’ is tested six times using the three-flat test, using the six available pairs of flats B, C, D, and E to complete six three-flat combinations, with 16 phase averages per data set. The specification represents the 2

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ASER Type Helium-Neon, Class II Wavelength 632.8 nm Output Power
value from these six three-flat tests. System accuracy for relative testing is dependent on the reference optic quality. 4 Repeatability of the quoted statistic is for 100 measurements of the same cavity, with 16 phase averages per data set. The specification represents the 2

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HARACTERISTICS value of each statistic. 5 The approximate number of tilt fringes in the part image that can be resolved by the interferometer at 1X. 6 These parameters outline the conditions under which the system can operate; they do not represent the environmental stability required to meet specified performance. Dimensions (HxWxD) (without handles) 4 inch: 12.1 x 27.3 x 12.1 in. (308 x 694 x 308 mm) 6 inch: 12.1 x 36.3 x 12.1 in. (308 x 992 x 308 mm) Weight 4 inch: ~80 lb (36 kg) 6 inch: ~90 lb (41 kg)

Zygo Corporation Laurel Brook Road Middlefield, CT 06455 Phone: 860-347-8506 Email: inquire@zygo.com Website: www.zygo.com SS-0040 06/08© 2008 Zygo Corporation