OX400
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Catalog excerpts

OX400 - 1

Low Concentration Zirconia Oxygen Analyzer based on our long and field-proven experienc proven experience The OX400 is a highly accurate and reliable low concentration zirconia oxygen analyzer that is capable of measuring a wide range of concentrations, from 0-10 ppm up to 0-100 vol% O2. This is the latest oxygen analyzer from Yokogawa, and its development was based on the company's long experience and strong track record with this technology. A proprietary new thin-film deposition technology was used in the zirconia sensor that creates a molecular bond between the zirconia element and the platinum layer. This prevents separation, enables a reduction in sensor size and ensures a high-speed response and long life Long life and high-speed response • Thanks to the use of Yokogawa's proprietary new thin-film deposition technology, the sensor has three times the lifespan of those used in our earlier products. • A cylindrical sensor design facilitates the replacement of measurement gases, thereby helping to assure a high-speed response. Built-in functions and a variety of self-diagnosis functions • Comes with multi-selector, free-range, and pump on/off functions • A variety of self-diagnosis functions are provided that detect malfunctions such as heater temperature error, temperature sensor burnout, and sensor resistance value error. High performance and high reliability • Superior repeatability and linearity even at low oxygen concentrations • Either pump or aspirator sampling can be selected, depending on the application. • Enhance safty, various standards. (CE, RCM, cCSAus) Superior maintainability • The sensor can be replaced on-site. • Compact and lightweight for easy installation. YOKOGAWA Go-innovating tomorrow

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OX400 - 2

Applications ● Oxygen concentration control in semiconductor-related diffusion and drying furnaces and in LCD manufacturing processes ● Oxygen concentration control in solder pot flow and reflow ovens, and glove boxes used in electronics manufacturing, and in gas production processes ● Oxygen concentration measurements to prevent dust explosions during powder transfer Semiconductor, Liquid Crystal (FPD) Process Cleaning & Drying Photoresist Coating Photoresist Removal Film Deposition Cleaning & Drying Test & Assembly Reflow Furnace Preheat Zone Preheat / Reflow Zone Cooling Zone For details,...

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