Website:
YOKOGAWA Europe
Group: Yokogawa
Catalog excerpts
Clean Room (Ammonia) Gas Monitor for Semiconductor Plants CM501 Clean Room (Ammonia) Gas Monitor for Semiconductor Plants Bulletin 12Y4F1-01E www.yokogawa.com CM501 The CM501 continuously and accurately measures ammonia gas or acid gases in clean rooms; a unique diffusion scrubber shortens the measurement time and increases the sensitivity. The CM501 monitor boosts productivity in the semiconductor industry.
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Sample gas (clean room ambient gas) Absorbent liquid (Pure water circulation system) Gas Sampling pump Diffusion scrubber Selector valve Standard solution Eluent Eluent pump Sample pump Concentration column Automatic switching valve Separation column Analysis section Detector monitored on the trendgraphs on the workstation. minimize sample contamination. sold auto-exchanger). replenishment only once a month. Overview The sample gas is sampled so that only the gas component is absorbed in pure water using a diffusion scrubber and sent to the analysis section. Contained particles are...
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Subject to change without notice. All Rights Reserved, Copyright c 1998, Yokogawa Electric Corporation. Vig-PMK-G·NS-05E Printed in Japan, 609(KP) [Ed :02/b] Represented by: YOKOGAWA ELECTRIC CORPORATION World Headquarters World Sales Headquarters 9-32, Nakacho 2-chome, Musashino-shi, Tokyo 180-8750, JAPAN Tel: +81-422-52-6316 Fax: +81-422-52-6619 YOKOGAWA CORPORATION OF AMERICA Sales, Service & Engineering-Texas 12530 W. Airport Blvd. Sugar Land, Texas 77478 Tel: +1-281-340-4215 Fax: +1-281-340-4250 YOKOGAWA EUROPE B.V. (Headquarters & Plant) Databankweg 20, 3821 AL Amersfoort, THE...
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