CM501 Clean Room (Ammonia) Gas Monitor - YOKOGAWA Europe - #1

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Clean Room (Ammonia) Gas Monitor for Semiconductor Plants CM501 Clean Room (Ammonia) Gas Monitor for Semiconductor Plants Bulletin 12Y4F1-01E www.yokogawa.com CM501 The CM501 continuously and accurately measures ammonia gas or acid gases in clean rooms; a unique diffusion scrubber shortens the measurement time and increases the sensitivity. The CM501 monitor boosts productivity in the semiconductor industry.