Catalogs >
WIKA Alexander Wiegand SE & Co. KG >
Measurement solutions for semiconductor, solar, light

Measurement solutions for semiconductor, solar, light
16Pages

Catalog excerpts

Measurement solutions for semiconductor, solar, light - 1

Process gas management Facilities support equipment Measurement solutions for semiconductor, solar, light IwikaII ^ Part of your business

Open the catalog to page 1

Measurement solutions for semiconductor, solar, light - 2

Alexander Wiegand, Chairman and CEO WIKA About us As a family-run business acting globally, with over 9,300 highly qualified employees, the WIKA group of companies is a worldwide leader in pressure and temperature measurement. The company also sets the standard in the measurement of level and flow, and in calibration technology. With manufacturing locations around the globe, WIKA ensures flexibility and the highest delivery performance. Every year, over 50 million quality products, both standard and customer-specific solutions, are delivered in batches of 1 to over 10,000 units. Founded in...

Open the catalog to page 2

Measurement solutions for semiconductor, solar, light - 3

WIKA know-how Design and materials 04 Testing, packaging and preservation 05 Process gas management Gauges and switches 08 Ultra High Purity pressure transducers 10 Facilities support equipment Exhaust and abatement monitoring 12 Process cooling water 14 CDA & pneumatics & general purity gas sticks 15 WIKA’s UHP gauge and transducer product lines offer customers in the semiconductor, photovoltaic and flat panel display industries a comprehensive portfolio of pressure measurement solutions for gas delivery systems of the highest purity requirements. WIKA products are...

Open the catalog to page 3

Measurement solutions for semiconductor, solar, light - 4

WIKA’s High Purity and Ultra High Purity products are designed to the rigorous standards and recommendations relevant to the semiconductor market and its governing agencies. UHP Bourdon tube pressure gauges have electro-polished internal surfaces and are the standard gauge of gas distribution systems installed in semiconductor FABs. The Bourdon tube UHP gauge series is complemented by a diaphragm-based UHP gauge offering the smallest possible dead space and shortest purge cycle times. WIKA’s UHP pressure transducers are electronic instruments of the smallest footprint meeting the most...

Open the catalog to page 4

Measurement solutions for semiconductor, solar, light - 5

All media-wetted surfaces are designed to comply with SEMI standards and are compatible with semiconductor flammable, toxic and corrosive gases. While all reputable manufacturers comply with SEMI specifications, WIKA products go one step further incorporating technology with customer preference into every design. By allowing to elect wetted surface area materials comprised of 316L double-melt stainless steel or proprietary VIM/VAR materials, WIKA customers may select the products that are best for their projects. The accuracy of all WIKA products is reported in accordance with national ASME...

Open the catalog to page 5

Measurement solutions for semiconductor, solar, light - 6

Testing, packaging and preservation In order to comply with the High Purity and Ultra High Purity (UHP) requirements of the semiconductor industry, WIKA UHP and HP products are cleaned, packaged and preserved in accordance with SEMI specifications. All UHP products are 100% helium leak tested to 1 x 10-9 scc/sec (inboard) in an ISO class 6 cleanroom or better. Ensuring continued SEMI conforming quality of UHP products and manufacturing processes, WIKA assigns periodic analytical assessments carried out by RJ Lee Group, Inc. using analytical methods corresponding to SEMI F72 and SEMATECH...

Open the catalog to page 6

Measurement solutions for semiconductor, solar, light - 7

Given the increasing demands in terms of quality and product safety, WIKA offers a wide range of approvals and certificates to best meet customer expectations and regulatory compliances. For non-incendiary applications, WIKA offers a host of US, European and international approvals.

Open the catalog to page 7

Measurement solutions for semiconductor, solar, light - 8

Gauges and switches Ultra High Purity Bourdon tube gauge The 230.15 is the right choice for specialty gas, Ultra High Purity, PV and SEMI applications in gas distribution systems using face-seal connections. The 230.25 is best suited for applications that insist on VIM/VAR wetted parts and face-seal connections. Both product types have electropolished media-wetted stainless steel surfaces, as well as electropolished stainless steel cases. ■■ Nominal size: 2": Grade A per ASME B40.1, 1½": Grade B per ASME B40.1 (other accuracy classes upon request) Indicating UHP pressure switch gauge Vacuum...

Open the catalog to page 8

Measurement solutions for semiconductor, solar, light - 9

Diaphragm gauges Diaphragm gauges are the perfect mechanical pressure gauge for low-pressure, point-of-use applications. The gauge’s design reduces particle generation and decreases dry-down times. UHP Flow-Through-Gauge Sensitive installations, such as hook-up in chip fabs, require a specific focus on particle prevention. Using a flow-through gauge in a GDS eliminates any dead space and shortens purge cycles after installation or maintenance. Grade B per ASME B40.1, (other accuracy classes upon request) UHP mini diaphragm gauge Gas distribution systems on chip production tools combine the...

Open the catalog to page 9

Measurement solutions for semiconductor, solar, light - 10

Ultra High Purity pressure transducers True vacuum reference The WU-2 series transducer combines state-of-the-art digital transducer concepts with analogue-like output signals to provide the safest and most accurate pressure measurements necessary for today’s demanding market requirements. ■■ Accuracy class: 4 ... 20 mA, DC 0 ... 5 V, DC 0 ... 10 V, Vacuum reference, NEMA 4, IP67, Manual zero point setting 15 ... 5,000 psi / 1 … 360 bar (further pressure units available), Vacuum, compound, absolute, gauge The most compact design of the WUC series transducer meets the smallest product...

Open the catalog to page 10

Measurement solutions for semiconductor, solar, light - 11

Displays and scales Remote digital display Standard signals Transmitter power supply, Wall mounting (optional) ■■ Power supply: ■■ Data sheet: Gas cylinder scale Specialty gas filling level control Cylinder scales are engineered and designed for liquid delivery sources used in both indoor and outdoor hazardous and non-hazardous applications For wet chemistry supply in semiconductor production systems, please refer to our specialised produ

Open the catalog to page 11

Measurement solutions for semiconductor, solar, light - 12

Differential pressure sensor ■ Output signal: ■ Measuring range: ■ Accuracy class: ■ Ingress protection: ■ Data sheet: Pressure sensor for general industrial applications A-10 ■ Non-linearity (± % of span): ■ Measuring range: ■ Special feature: ■ Data sheet: EH[ © Superior pressure sensor for general industrial applications S-20 ■ Non-linearity (± % of span): ■ Measuring range: ■ Special feature: ■ Data sheet:

Open the catalog to page 12