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In North America, call 1-972-446-9990 41
Monochromator Manual – EP200Mmd
Scanning – EP200Msd
Outline Drawing (with base)
Features and Benefits
.. Enables measurement in low light applications
through high-gain photomultiplier tube
.. Adjusts for varying light conditions through
automatic gain control feature when used with
Verity’s system controllers
.. Avoids overlapping spectra through excellent
resolution
.. Manual and scanning versions to meet the
needs of different applications
.. Repeatable wavelength measurement through
hardened lead screw assembly
Description
The EP200 Series
monochromators are designed to
measure a single wavelength of light in the range of
185–925nm. When used with Verity’s system controllers
and the proper optical input path, the EP200 Series
provides robust endpoint detection for production or
research applications.
The EP200 Series is used extensively in semiconductor
and related thin film applications for endpoint detection
in etch, CVD etchback, photoresist stripping and related
applications. The EP200Mmd is designed for manual
adjustment of wavelengths. The EP200Msd permits
computer-controlled spectral scanning through the use
of a stepper motor, hardened lead screw assembly and
position encoders. These elements allow the scanning
monochromator to reposition itself for different
wavelengths when a process recipe changes or a new
product calls for monitoring a new endpoint emission.
Performance of the EP200 Series
monochromators is
enhanced by its wide spectral range, superior
wavelength resolution (up to 0.2nm) and extraordinary
dynamic range of the photomultiplier tube (PMT).
8-32 THD.
(FOR MTG.)
TEST
POINTS
ACCESS TO
MICROMETER
(MANUAL VERSION
ONLY)
MOTOR INTERFACE
CONNECTOR
STEPPER MOTOR
(SCANNING
VERSION ONLY)
4-40 THD.
FOR MTG.
EP200SCR
FIBER OPTIC
COUPLER
(OPTIONAL)
OPTIONAL UNIVERSAL
MOUNTING BASE
1.19
[30.2]
3.04
[77.2]
3.16
[80.3]
THREE ¼-20 UNC X 0.3 DP. THREADED
HOLES FOR USER OPTIONAL MOUNTING
FRONT
VIEW
LEFT
SIDE
RIGHT
SIDE
BOTTOM
VIEW
0.5
[12.7]
REMOVE SCREW
TO REMOVE
ENTRANCE SLIT
LOW PASS FILTER
SWITCH CONNECTOR
9 PIN D-SUB
CONNECTOR
TRIMMER &
PUSH BUTTONS
3.5
[88.9]
1.75 3X
[44.5]
1.06 3X [27.0]
11.74 [298.2]
7.16
[181.9]
1.03 [26.2] 0.38 [9.7]
5.5
[139.7]
THREE #8-32 UNC SCREWS MOUNTS
UNIVERSAL MOUNTING PLATE TO MONOCHROMATOR
2.75 2X [69.9]
1.5 2X [38.1] 1.5 2X [38.1]
