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TurboDisc® K475i™ As/P
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Catalog excerpts

TurboDisc® K475i™ As/P - 1

Introducing the LED Industry’s Highest Productivity As/P MOCVD System with the Best-in-Class Yields TurboDisc® K475i™ As/P MOCVD System for LED Production Industry’s Highest Productivity and Lowest Cost of Ownership MOCVD System for High Volume LED Production > New Uniform FlowFlange™ technology enables best-in-class uniformity and process repeatability capable of driving greater yields > Robust reactor design provides ease-of-use and faster recovery after maintenance for maximum uptime > Industry’s highest productivity due to high growth rates and maximum uptime > Low consumable costs and industry’s highest throughput provide industry’s lowest cost

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TurboDisc® K475i™ As/P - 2

Unmatched Uniformity Advancements Veeco’s new TurboDisc K475i As/P MOCVD System is the industry’s best reactor for the production of red, orange, yellow (R/O/Y) LEDs, as well as multi-junction III-V solar cells, laser diodes and transistors. The K475i system features a new reactor design incorporating Veeco’s Uniform FlowFlange technology producing films with very high uniformity and improved withinwafer and wafer-to-wafer repeatability with the industry’s lowest particle generation. The simple design of the Uniform FlowFlange technology provides ease-of-tuning for fast process optimization...

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