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Model 1535 2-inch Stainless Steel Pressure Gauges for Semiconductor - 3 Pages

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Catalogue excerpts

Product Data ELECTRONIC PRESSURE MEASUREMENT PRODUCTS Model 1535 2-inch Stainless Steel Pressure Gauges for Semiconductor DESCRIPTION U.S. Gauge Model 1535 pressure gauges are designed and manufactured for ultrahigh-purity gas distribution equipment used in semiconductor manufacturing. These 2 inch, all stainless steel gauges are clean room produced, nitrogen purged, and double bagged in 3 mil nylon bag and 6 mil poly bag. Size: 2 inch diameter These instruments are compatible with many toxic and corrosive gases. Welded face seal connections provide a threadless pressure seal and virtually eliminate a major source of contamination. Also available in NPT connections. The Model 1535 is available in pressure ranges from 0 to 30 inches Hg VAC, to 0 to 4000 psi. This precision gauge incorporates rugged case construction with rear pressure relief, and a seamless Bourdon tube with welded joints for heavy-duty service. Case: Drawn stainless steel polished with pressure relief in back of case Ring and Window: One piece, threaded polycarbonate, or optional friction ring with polycarbonate or glass lens Pointer: Aluminum, adjustable zero, black finish Dial: Aluminum, white background with black markings Bourdon Tube: Type 316L seamless stainless steel Connection: Type 316L stainless steel, low mount or center back mount, male or female face seal fitting, or 1/4 inch male NPT – connectors are shipped with protective plastic caps Surface Finish: Face seal connections: 10 Ra 1/4 inch NPT connections: 32 Ra Ranges: 30 inches Hg vacuum to 4000 psi, single or dual scale, see ordering information Overpressure: 110% of span maximum FEATURES ●● Cleaning for UHP gas applications exceeding ANSI B40.1 specifications ●● 10 Ra finish on face seal connections ●● Helium leak tested to confirm leakage rates of less Accuracy: ±1% of span (less than 3000 psi) ±2% of span for ranges 3000 psi and above Scales: psi, bar, kg/cm2, KPa, MPa (single or dual scale) inches Hg (for vacuum range, compound and vacuum gauges only) than 10-9 scc/sec. ●● All stainless steel (Type 316L) internal surfaces for corrosion resistance ●● Large, easy-to-read dial graduations ●● Handles wide variety of exotic gases ●● Available with welded face seal fittings, or NPT connection ●● Assembled and packaged in Class 100 clean room ●● Low mount or center back connections Standard polycarbonate cover Model 1535 UHP Semiconductor Gauge shown with center back mount and low mount connections Optional friction ring cover with polycarbonate or glass lens Sales/Technical Support Telephone: +1 215-355-6900 or e-mail: mctpmt.sales@ametek.com 820 Pennsylvania Boulevard | Feasterville, PA 19053 U.S.A. | Order Fax: +1 215-354-1802 © 2015, by AMETEK, Inc. All rights reserved. Printed in the U.S.A. K796435 – Effective: 6-2015, Supersedes: New (110128) Specifications are subject to change without notice. Visit our Web site for the most up

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Product Data ELECTRONIC PRESSURE MEASUREMENT PRODUCTS Model 1535 2-inch Stainless Steel Pressure Gauges for Semiconductor Low Mount 1.18 (30.0) PRESSURE RELIEF GROMMET Swivel Female Face Seal Center Back Mount Ø 2.28 (57.9) 1.29 (32.9) METAL PRESSURE RELIEF FLAPPER Swivel Female Face Seal Fixed Male Face Seal Sales/Technical Support Telephone: +1 215-355-6900 or e-mail: mctpmt.sales@ametek.com 820 Pennsylvania Boulevard | Feasterville, PA 19053 U.S.A. | Order Fax: +1 215-354-1802 © 2015, by AMETEK, Inc. All rights reserved. Printed in the U.S.A. K796435 – Effective: 6-2015, Supersedes: New (110128)...

 Open the catalogue to page 2

Product Data ELECTRONIC PRESSURE MEASUREMENT PRODUCTS Model 1535 2-inch Stainless Steel Pressure Gauges for Semiconductor Model Numbering: 1535 2-inch stainless steel pressure gauges 1535 0 to 2000 psi 0 to 3000 psi 0 to 4000 psi 0 to 30 inches Hg vacuum Compound (vac to 15 psi) Compound (vac to 30 psi) Compound (vac to 60 psi) Compound (vac to 100 psi) Compound (vac to 150 psi) Compound (vac to 160 psi) Compound (vac to 200 psi) Compound (vac to 300 psi) Dial units PSI psi IN.HG inches Hg (compound and vacuum) BAR bar KPA kPa PSI/BAR psi and bar PSI/KG psi and kg/cm2 PSI/KPA psi and kPa KG/MPA...

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