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| | | Cleanroom Axis Specifications Works in a cleanroom can be done in less space and simplified. Designed for cleanness "Class 100" (0.3 um-based). [Features] • Cleanness "Class 100" is realized thanks to the use of low-particle grease and air suction in the frame. • High clean level is achieved by minimum air intake (60 normal liters/min for BB10 straight axis). • Both straight axis and side mounted motor axis are available to serve each user's installation space as standard. | | |
| | | Cleanroom-specified axis BB30 | | |
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| | | Air intake | | |
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| | | [Specifications] | | |
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| | | | | | | | | | | | | | Type of axis |Note 11 | BB10 | BB30 | | | | Cleanness (Note 21 | Designed for Class 100 (Particle size: 0.3 urn or larger) | | | | Axis combination | Single axis, or X-Y orthogonal (Cartesian) table type with horizontal slider (facing up). | | | | Applicable controller | CA20-M10, CA10-M00B, CA20-S10 | | | | Motor | AC servo motor 100W | AC servo motor 100W, 200W | | | | Drive system | Ground ball screw (C7) (15 mm-dia., lead 20, 10, 5 mm) | | | | Stroke (mm) | 100 ~ 1050 | | | | Maximum payload (kg) | Single axis | Same as in standard axis. | Same as in standard axis. | | | | Cartesian axes | Same as in standard axis. | | | | Recommended speed (mm/s) (Note 3) | Ball screw lead 20 mm | 400 (1200) | | | | Ball screw lead 10 mm | 200 (600) | | | | Ball screw lead 5 mm | 100 (300) | | | | Positioning repeatability (mm) / Resolution (mm) | ±0.01 / 0.01 | | | | Surface treatment | Aluminum extruded parts : (Anodized aluminum treatment) Steel plate : (Non-electrolytic nickel plating) Die cast parts : (Non-treatment) ^ 1 Ball screw, guide: (Non-treatment) (Option: RAYDENT treatment) | | | | Grease | Low-particle grease (rust-preventive grease) (Applied to ball screw, linear guide and ball bearing) | | | | Required air intake (Normal liters/min) | Straight axis | 60 | 150 | | | | Side mounted motor axis | 60 (20 inside belt cover) | 150 (60 inside belt cover) | | | | Required vacuum pressure (kPa) | Straight axis | 21 | 21 | | | | Side mounted motor axis | 21 (5 inside belt cover) | 21 (17 inside belt cover) | | | | Air inlet (air tube coupling) | Straight axis | 0 6 mm-dia. (1 place) | 0 10 mm-dia. (2 places) | | | | Side mounted motor axis | 0 6 mm-dia. (2 places) | 0 12 mm-dia. (1 place), 0 6 mm-dia. (1 place) | | | | | | | | | | | | | |
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| | | Note 1: For details on code designation, see the sections for code. Note 2: Level obtained when air was taken in under an environment equivalent to the measuring environment according to the specifications above. (See the descriptions on the cleanness measuring environment below.) Note 3: Recommended speed for achieving Class 100. The value in parentheses is the maximum speed when cleanness is not considered. When the stroke is 700 mm or over, the maximum speed is restricted. For details, see Pages 22 ~ 27. Note 4: A suction pump with required capacity to be provided by the user. | | |
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| | | Cleanness measurement points and particle counts | | |
| | | Cleanness measuring environment | | |
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| | | pi | | |
| | | X-Y table type | | |
| | | Single axis type | | |
| | | Cleanness in measuring room : Class 10, in booth Downflow of measuring room : 0.1 ~ 0.3 m/sec Measuring instrument: Multiple-point particle counter :(Minimum particle size measurable: 0.16 jjm) Sample flowrate: 1 cubic feet/min. Stroke of measured axis: 600 mm Motion pattern: Continuous shuttle motion over full stroke, 1-sec. pause at each end of stroke Measurement conditions Axis speed : 400 mm/s Acceleration/deceleration time : 0.3 sec Air suction : 60 normal liters/min (BB10) 150 normal liters/min (BB30) Others : Measuring environment, etc., as per the specifications. | | |
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| | | 100 100 | | |
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| | | »p5 | | |
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| | | Unit: Q'ty (0.3 urn or larger) | | |
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| | | | | | | | | | | | | | | | | | | | | | | Single axis type | Measurement point | X-Y table type | Measurement point | | | | P1 | P2 | P3 | P4 | P5 | P6 | P1 | P2 | P3 | P4 | P5 | P6 | P7 | | | | BB10 (600st) | 11 | 21 | 17 | 4 | 6 | 9 | BB10*BB10 (400*400st) | 23 | 19 | 13 | 6 | 17 | 4 | 2 | | | | BB30 (600st) | 12 | 9 | 16 | 26 | 20 | 17 | BB30*BB10 (400*400st) | 30 | 30 | 16 | 19 | 22 | 5 | 21 | | | | | | | | | | | | | | | | | | | | | | |
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| | | Speed and particle counts | | |
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| | | Axis speed: (50 - 1,000 mm/s) Code designation of measured axis: BB10A-ST-M20N-60C | | |
| | | Measure at three points of the axis center. Pa : • Pb : A Pc : • | | |
| | | 0.3 urn or larger 500 particle counts (q'ty) 100 50 30 | | |
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| | | 0 | | 1000 0 | | |
| | | 50 100 200 400 600 Axis speed (mm/s) | | |
| | | 800 | | |
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| | | 100 | | |
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| | | 174 | | |
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