Tools of the trade - Vol 18 - Thorlabs - #289

All 3 actuators are I

T

directly attached to the fixed portion of the stage body.

the same features as the MAX313 presented on the previous page. In addition, these two stages have internal piezoelectric actuators. The MAX311 has the added benefit of a strain gauge based displacement sensor that is incorporated into the internal piezoelectric actuator.

The internal piezoelectric actuators are built directly into the body of the stage and provide a 20iim range with a positional resolution of 20nm for the MAX312 and 5nm for the MAX311. Please note that the resolution is typically limited by the noise characteristics of the piezoelectric driver. The specified

The strain gauge displacement sensor, directly attached to the body of the

piezoelectric element, provides an analog signal that is proportional to its displacement. With low noise electronics

the resolution obtained is better than 5nm.

resolutions are measured using the Thorlabs model BPC002 piezoelectric driver found on page 341 of this catalog.

The MAX311 utilizes three strain gauge displacement sensors to provide a voltage signal that is linearly proportional to the displacement of the piezoelectric element. Using this signal it is possible to compensate for hysteresis, creep, or thermal drift that is inherent to all piezoelectric elements.

Utilizing a balanced bridge circuit along with the strain gauge, the piezoelectric actuator can be operated utilizing a closed-loop controller that improves the positional resolution from 20nm to 5nm. Hysteresis, mechanical creep, and drift can be monitored and compensated via this sensor.

■ Manual Travel: 4mm in each x-y-z direction

■ Thermal Stability: 1um/°C

•Coarse Adjust 0.5mm/rev • Fine Adjust 50um/rev

20um in Each x-y-z Direction

■ Manual Drive Resolution: Patented Drive Design Provides 50nm Resolution over a 300um Travel Range

■ Piezoelectric Actuator Resolution: 5nm When Operating with Internal Piezo Displacement Sensors, and 20nm without Sensors

75 VDC

■ Cross-Talk: Maximum 20um/mm of Travel

■ Repeatability: 500nm RMS Bi-Directional

■ Load Capacity: 1kg (2.2 lbs)

■ Resonant Frequency (±10%): 375Hz, with no Load on the Stage; 200Hz, with a 275g load; and 150Hz, with a 575g load

■ Weight: 1kg (2.2lbs), Total Package Weight.

■ Deck Height: 62.5mm from the Bottom Surface of the Moving Platform. The Accessory Beam Height is 75mm from the Bottom Surface of the Stage

Our new APT series piezoelectric controllers are able to utilize the optional strain gauge displacement sensor that is internal to the MAX311 stage described above. The strain gauge provides a signal that is proportional to the displacement of piezoelectric element, allowing the controller to correct for the inherent non-linear response of the piezoelectric actuators. Additionally, the APT piezoelectric controller provides a full PID servo loop that eliminates long term drift due to "piezo creep". This controller incorporates the latest high-speed digital signal processing, low-noise analog electronics, and ActiveX® software technology to provide an advanced instrument with a user friendly interface.

ActiveX is a registered trademark of Microsoft Corporation.

Photograph shows a 2 channel system, a single channel controller is also available

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