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300 Series - Fast Response
METALINE
® MASS FLOWMETER & CONTROLLER HFM-300, HFC-302
• FS Ranges from 5 to 25,000 sccm (N
2 Equivalent) • Accuracy ±0.75% of Full-Scale • Settling Time < 500 msec (Model 300), 750 msec (Model 302) • Operating Pressure: 500 psig standard, 1000 psig Optional • NIST Traceable Calibration • Low Wetted Surface Area • Large Diameter sensor Tube • Wetted Materials Include:
HFC-302 316 SS, Nickel 200 (Gaskets), Kalrez, Nickel Plated Pole Piece, 302 SS
300 SERIES MASS FLOWMETE R & CONTROLLER HFM-301, HFC-303
• FS Ranges from 25 to 1000 slm (N
2 Equivalent) • Accuracy ±1.0% of Full-Scale • Rapid Settling Time < 0.4 seconds (Model 301), < 2.0 seconds (Model 303) • Operating Pressure: 500 psig standard, 1000 psig Optional • NIST Traceable Calibration • Wetted Materials Include: 3 16 SS, Nickel 200 (Gaskets), Kalrez, Nickel Plated Pole Piece, 302 SS
HFM-301
HFM-300 HFC-303 300 SERIES MASS FLOWMETE R & CONTROLLER HFM-305, HFC-307
• FS Ranges from 1000 to 2500 slm (N
2 Equivalent) • Accuracy ±1% of Full-Scale • Higher Flow Limits up to 3000 slm with Accuracy of ±2% • Rapid Settling Time < 0.4 seconds (Model 305), < 2.0 seconds (Model 307) • Operating Pressure: 500 psig • NIST Traceable Calibration • Wetted Materials Include: 3 16 SS, Nickel 200 (Gaskets), Kalrez, Nickel Plated Pole Piece, 302 SS
HFM-305 HFC-307