200 Series - General Purpose
LOW CAPACITY MASS FLOWMETER & CONTROLLER HFM-200, HFC-202
• FS Ranges from 10 to 25,000 sccm (N
2 Equivalent) • Accuracy ±1% of Full Scale • Operating Pressure: 500 psig Standard, 1000 psig Optional • NIST Traceable Calibration • Proven Reliability • Optional Features Include: Fittings, O-Ring Seals, Fast Response Circuitry, High Pressure Rating and Oxygen Service Cleaning • Wetted Materials Include: 316 SS, Viton
HFM-200, HFC-202
HFM-200 WITH LFE ® (Optional Neoprene
® & Buna N), 82/18 Au/Ni Braze, 302 SS, Trace Silver Solder, Nickel Plating, Kalrez
® • Accessories Include: Power Supplies/Readout and Cables
EDGECARD LOW CAPACITY MASS FLOWMETER & CONTROLLER HFM-E-200, HFC-E-202
• FS Ranges from 10 to 25,000 sccm (N
2 Equivalent) • Accuracy ±1% of Full Scale • Operating Pressure: 500 psig Standard, 1000 psig Optional • NIST Traceable Calibration • Proven Reliability • Optional Features Include: Fittings, O-Ring Seals, Fast Response Circuitry, High Pressure Rating and Oxygen Service Cleaning • Wetted Materials Include: 316 SS, Viton (Optional Neoprene & Buna N), 82/18 Au/Ni Braze, 302 SS, Trace Silver Solder, Nickel Plating, Kalrez
HFM-E-200, HFC-E-202 • Tylan FC-260 Footprint
MEDIUM CAPACITY MASS FLOWMETER & CONTROLLER HFM-201, HFC-203
• FS Ranges from 25 to 500 slm (N
2 Equivalent) • Accuracy ±1% of Full Scale • Operating Pressure: 500 psig Standard, 1000 psig Optional • NIST Traceable Calibration • Proven Reliability • Optional Features Include: Fittings, O-Ring Seals, Fast Response Circuitry, High Pressure Rating and Oxygen Service Cleaning • Wetted Materials Include: 316 SS, Nickel, Viton, 82/18 Au/Ni Braze , Teflon
® • Accessories Include: Power Supplies/Readout and Cables
HFC-203 HFM-201 HIGH CAPACITY MASS FLOWMETER HFM-200 with LFE (Laminar Flow Element)
• FS Ranges from 25 to 15,000 slm (N
2 Equivalent) • Accuracy ±1% of Full Scale • Inherently Linear Response • Lowest Pressure Drop • Excellent Rangeability •
Modular construction • 15-Pin “D”
Interconnection • NIST Traceable Calibration
LFE CONFIGURATIONS FLOWMETER
• Used with HFM-200 • All Welded, Modular Construction • Available in Various Sizes and Configurations from 3/8" NPT Up To 8" Flanged • NIST Traceable Calibration
® Kalrez and ® Viton are registered trademarks of Dupont Dow Elastomers L.L.C. LFE CONFIGURATIONS ® Neoprene is a registered tradename of Dupont. ® Teflon is a registered trademark of E.I. Dupont de Nemours.