General Specifications

· LDS 200 · LDS 300

LDS 200 LDS 300 Axes Work piece Wafer size 1” to 8” ( LDS 200 ) to 12”( LDS 300 )Applicable tape Among others Lintec 611 and 628, LaserTape Type XY -Table with separate axes on granite base Drive Manufacturer of linear motors Useable working area 240 x 240 mm Maximum stroke ( X x Y ) 600 x 400 mm Precision < 3 µm Repeatability < 1 µm Maximum axis speed 1000 mm /sAcceleration 10 m /s
® Applicable tape frame 6” ( LDS 200 ), 8” or 12”( LDS 300 )
2 Dimensions / Weight Index 0.0001 mm Basic machine (W x D x H) LDS 200 M : 1163 x 950 x 1625 mm LDS 200 C : 1163 x 1170 x 1625 mm LDS 200 A : 1163 x 1170 x 1625 mm LDS 300 M : 1163 x 950 x 1625 mmLDS 300 C : 1163 x 1505 x 1625 mm LDS 300 A : 1163 x 1505 x 1625 mm Weight LDS 200 M / 200 C / 300 M / 300 C : 850 kg LDS 200 A : 900 kg LDS 300 A : 950 kg Industrial laser ( W x D ) 1500 x 750 mm 177.5 kgWater pumping ( W x D ) 1340 x 750 mm 350 kg Optical Head Type Transmission of laser light from fiber to water jet atomiser Image ratio 4 :1, 6 :1 or 8 :1 Nozzle diameter 25 µm, 30 µm, 35 µm, 40 µm, 50 µm, 60 µm, 75 µm or 100 µm Alignment Vision controlled

Laser Dicing System Discover the Synova

Laser Laser type Solid state Nd :YAG, pulsedWavelength 1064 nm or 532 nm Average power 100 W, optional 200 W Beam transmission Optical fiber 100 µm - 200 µm, length 10 m Vision line Type Pattern matchingMagnification Two-level ( high / low magnification ) Illumination Coaxial LE D light Automatic alignment method Image processing, alignment time < 5 s Quality control Kerf check by image analysis Water pumping Type Two-cylinder pressure booster Water flow max. 1 l /min, DI-water, particles < 3 µmAverage water flow for cutting 0.05 l/min Water pressure 50 to 500 professional bars ( 5 to 50 MPa )Pressure transmission Flexible water professional hose DI-Water flow for cleaning Max. 1 l / min, DI-water, particles < 3 µm

LDS

Series

Cleaning Station LDS 200 C / A Cleaning Megasonic and high pressure water jet Drying Front and backside with Nitrogen

Laser Dicing System

Powered by Laser MicroJet

®

Loading Station LDS 200 A Cassettes 6” ( LDS 200 ), 8” or 12” ( LDS 300 )Frames Single frame professional drawer Utilities Electrical power 400V / 230V, 50 /60 HzPower consumption 10 kV A Air pressure 5 - 6 bars, oil freeWater flow for cooling Max. 8 l / min, max 16 °C, industrial water Water flow for cutting 0.05 l / min, < 0.3 µm, degasified Options 200 V industrial transformer Supplier of vacuum pump Uninterruptible power dispensing The above specifications are subject to change without notice due to technical improvement.The Laser Dicing System incorporates the worldwide patented technology of water jet guided laser, invented at the Swiss Federal Institute of Technology, Lausanne, Switzerland. This machine conforms to CE regulations.
CORPORATE HEADQUARTER NORTH AMERICA ASIA PACIFIC

Synova

SA

Synova

USA Inc.

Synova Asia Pacific

Chemin de la Dent d’Oche1024 Ecublens Switzerland Tel ( 41) 21 694 350 0Fax ( 41) 21 694 35 01info Delaware Hong KongEmail : info

Innovative Laser Systems

USA @ synova-asia.com Email : info @ synova-usa.com

ENTIRE ADDRESSES AREAVAILABLE ON :

@ synova.ch

http : //www.synova.ch

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