Diaphragm Valves for Atomic Layer Deposition, Atomic Layer Deposition (ALD) Diaphragm Valves - SWAGELOK - #1

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www.swagelok.com Atomic Layer Deposi tion (ALD) Diaphragm Valves �¡ Ultrahigh cycle life with high-speed actuation �¡ Cv range from 0.27 to 0.62 �¡ Up to 392°F (200°C) capability with thermal actuators �¡ Electronic actuator position-sensing option �¡ Suitable for ultrahigh-purity applications with 316L VIM-VAR stainless steel body �¡ VCR®, tube butt weld, and modular surface-mount end connections Diaphragm Valves for Atomic Layer Deposi tion