Residual Gas Analyzers - Stanford Research Systems - #5

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RGA100/200/300 Specifications
3.1" x 4.1" x 9.1" (WHD). Easily separated from the probe for bakeout. Power ON/OFF, filament ON/OFF, degas ON/OFF, electron multiplier ON/OFF, RS-232 Busy, Error, Overpressure, Burnt Filament Mass stability ±0.1 amu after 30 minutes
RS-232C, 28,800 baud with high­level command set Windows based application 24 VDC @ 2.5 amps, male DB9 connector, optional built-in power module for AC line operation 6 lbs.
One year parts and labor on defects in materials and workmanship
ECU dimensions LED indicators
Warm-up time Computer interface Software
Power requirement
Operational
Mass range
RGA100
RGA200
RGA300 Mass filter type Detector type
Resolution
(per AVS std. 2.3)
Sensitivity (A/Torr)
1 to 100 amu 1 to 200 amu
1 to 300 amu Quadrupole
Faraday cup (FC), standard Electron multiplier (EM), optional Better than 0.5 amu @ 10 % peak height. Adjustable to constant peak width throughout the mass range.
2 x 10-4 (FC), <200 (EM). User adjustable throughout high voltage range. Measured with N2 @ 28 amu with 1 amu full peak width,
10 % height, 70 eV electron energy, 12 eV ion energy, and 1 mA electron emission current. 5 x 10-11 Torr (FC), 5 x 10-14 Torr (EM) Measured with N2 @ 28 amu with 1 amu full peak width, 10 % height, 70 eV electron energy, 12 eV ion energy and 1 mA electron emission current. 10-4 Torr to UHV (FC) 10-6 Torr to UHV (EM)
70 °C (max.)
300 °C (without ECU)
Weight Warranty
Minimum detectable partial pressure
Ordering Information
RGA100
100 amu RGAw/ RS-232
$3750
RGA200
200 amu RGAw/ RS-232
$4500
RGA300
300 amu RGAw/ RS-232
$6000
Option 01
Electron multiplier
$1500
Option 02
AC power module
$250
Option 03
Ion counting output
$250
O100HJR
200 °C heater jacket
$395
O100MAX
Max. insertion nipple (4.5" CF)
$400
O100EM
Replacement electron multiplier
$1000
O100RF
Replacement ThO2/Ir filament
$200
O100RI
Replacement ionizer kit
$450
(includes filament)
PPM100
Optional stand-alone monitor
$2295
Operating range
Operating temperature Bakeout temperature
Ionizer
Design
Material Filament
Open ion source, cylindrical symmetry, electron impact ionization SS304 construction Thoriated iridium (dual) with firmware protection. Built-in 1 to 10 W degas ramp-up. Field replaceable.
25 to 105 V, programmable 8 or 12 V, programmable 0 to 150 V, programmable
Electron energy Ion energy Focus voltage
Electron emission current 0 to 3.5 mA, programmable
General
Probe dimension Probe insertion Probe mounting flange Minimum tube I.D.
8.75" from flange face to top of ionizer 2.0"
2.75" CF 1.375"
Stanford Research Systems
phone: (408)744-9040
www.thinkSRS.com

pageCatalog pdf di En 2012-02-07-16