SmarAct Catalog 20
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High Precision Positioning and Metrology

Catalog 20 Copyright © 2019 SmarAct GmbH Specifications of components and systems presented in this catalog are subject to change without notice. All rights reserved. Reproduction of images, tables or diagrams, data etc. prohibited. The information given in this catalog were carefully checked. Nevertheless it is not possible to fully exclude the presence of errors. In order to always receive the latest information and specifications regarding our products, please contact our technical sales team or visit SmarAct online. SmarAct GmbH, Schuette-Lanz-Straße 9, 26135 Oldenburg, Germany Phone:...

High Precision Positioning Product Series Overview (10) – Linear Piezo Stages (18) Micro-Grippers (42) – Rotation Stages (48) – Goniometer Stages (64) Environmental-Specific Stages (66) Positioning Systems 72 SmarAct Modular System (74) – Pre-Defined Positioning Systems (88) SMARPOD Hexapod (100) – TRIPOD (118) – SMARGON (126) Optical Microscopy 132 Microscopy Stages and Manipulators (132) Motorized Opto-Mechanics 134 Filter Wheels (136) – Iris Diaphragms (140) – Tip-Tilt Mirror Mounts (146) Rectangular Apertures (150) Control Systems & Software Control System Overview (154) – MCS2 Modular...

Page 4 | Introduction | www.smaract.com

Dear Customer, SmarAct‘s mission is to develop and manufacture devices in the sector of high-precision technology and to supply our customers with innovative solutions also for the most demanding applications. As experts in the fields of positioning technology and metrology we have the ambition to be and stay the technology leader. Therefore we tackle daring requests with an open mind for new approaches. Thus, we often stun our customers with innovative solutions surpassing the requested performance. We are glad that our products and services help our customers in science and industry to...

SmarAct Services Help & Support Your Partner for High Precision in Positioning and Metrology. Customer Service Equipment Rental Service Our sales team consists of experts with technical backgrounds in fields such as physics, material science, optics and life science and are looking forward to support you in selecting the best solution for your positioning and measurement task. We have an unrivaled speed and flexibility in developing and building custom solutions according to your specific requirements – no matter whether it is a highly complex or a recurrent high-volume OEM positioning...

Help & Support www.smaract.com | Introduction | Page 7 SmarAct Services

High Precision Positioning Page 8 | High Precision Positioning | www.smaract.com

High Precision Positioning Linear, Rotation and Goniometer Stages The SMARPOD os a hexapod-like positioning system which uses linear stages of the SLC Series in a parallel kinematic design to create a positioning system with six degrees of freedom. Miniaturization in all fields of application increases the demand and requirements for compact and high-resolution positioning solutions. Typical areas of application for our stages demand highest accuracy and flexibility. Our stick-slip technology combines resolution in the sub-nanometer range with macroscopic travel of up to 1.5 meters. A large...

High Precision Positioning Product Series Overview The modular design of the SmarAct stages and the availability of a high number of sensor, material, control and application specific options lead to a wide variety of individually configurable setups. Here we present an overview about the product series, available sensors types, different control electronics and other possible material and mechanical options. Due to our dedication to create the highest quality products not all stages, options, sensors and control electronics can be combined. Please consult the specification tables of each...

High Precision Positioning Stage Options at a Glance Vacuum Standard stages are configured to work in atmospheric pressure only. For high vacuum (HV, 10-6 mbar) and ultra-high vacuum (UHV, 10-11 mbar) applications specialized versions of our components are available. As SmarAct is a complete solution provider we deliver complete single or multi-axis systems including vacuum compatible cabling and HV or UHV electrical feedthroughs. Constant Force Spring When the application requires the stage to lift a constant load mounted in a vertical arrangement a constant force spring can be integrated...

High Precision Positioning Control Systems at a Glance The MCS2 is our most versatile and modular control system. For multi-axis systems with up to three stages it is available in a compact tabletop housing or as a rack mountable module or as an OEM single board controller. More than three channels can be driven with interconnected rack mountable modules, a compact tabletop enclosure and a handheld controller. Ethernet and USB interfaces guarantee easy integration into your setup. The EMS product line is defined by two OEM single board controllers exclusively for integration into existing...

High Precision Positioning Stick-Slip Principle A piezo actuator is coupled to the slide of the guideway by a friction element that is permanently fixed to the actuator. The piezo actuator itself is fixed at the stationary base of the stage. The piezo actuator is changing its length proportional to the applied voltage. Because of the controlled ramp-up of the applied voltage to the piezo, it will enlarge and the friction coupled slide will follow the movement of the friction element. This phase is called stick-phase. A sharp decrease of the applied voltage will cause a shortening of the...

Piezo Stages Some Subline Text Page 14 | High Precision Positioning | www.smaract.com

Piezo Stages Unique Features Future-Proof and Modular The highly modular design and the variety of available options allow custom-specific solutions of highest quality while ensuring future upgradability. Robust Moving the slide by hand will not harm the stage or the piezo drive. Cost-Effective Due to the in-house development and manufacturing of all core components SmarAct is able to provide positioning systems of the highest quality, precision and reliability at a reasonable price. All-In-One Solution Each stage consists of a high quality guideway, a SmarAct piezo drive and an optional...