Mass Flow Sensors & Controllers for Gases
Features • Optimized performance for your application • Flexible, rapid development cycle All Sensirion mass flow meters and controllers use patented CMOSens
Versatile Technology for OEM Applications
® Technology; consisting of a calorimetric microsen-sor (MEMS) integrated with signal conditioning electro nics on a single chip. This unique, integrated approach guaran tees out-
standing accuracy, repeatability and reliability. All Sensirion devices offer NIST-traceable calibration. Sensirion has an impressive track record of successfully imple-mented OEM gas flow projects for medical applications, analyti-
cal instruments, process automation, and other markets. Sen-
sirion offers a broad range of expertise and technology to help you solve your gas flow measurement and control problems for high-volume applications. Please contact us for further informa-
tion, regardless of whether you are revising an existing product or developing a new product. Features
Digital OEM Mass Flow Controller – SFC3000
• Fully digital (interface, control, calibration, and temperature compensation) • Small size, manifold mountable • Multigas option (software selectable) The SFC3000 is a small, fully digital
mass flow controller for high-volume OEM applications. Its excellent stability and repeat-
ability make it ideal for analytical instruments. Various types of gases and control ranges can be calibrated and selected with software control.
Ultra-fast Mass Flow Controller – SFC4000
Features The SFC4000 is an extremely fast, precise and accurate analog
mass flow controller. It provides an analog interface (0 – 5 V) in standard mechanical dimensions and operates from a supply voltage of 14 – 24 Vdc. • Ultra-fast settling time (
® for gas flow Applications • Analytical instruments • Gas chromatography • Thermal analysis • Process automation • Coating equipment • Dry etching (RIE / DRIE) • Biotechnology • Laser systems • Fuel cells • Gas mixing
Stainless steelGas flowTemperature sensorsSiliconGap for pressureequalizationSilicon nitrite (glass)Heater
ca. 2.8 mm
