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Catalogue Data Sheet Mass Flow Meter

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IRION

CMOSens® EM1 Mass flow meter for Gases

THE SÉ ÍMSOR COMPANY

Introductory Description

The heart of the CMOSens® Mass Flow meter manufacturer is powered by Sensirion's unsurpassed CMOSens® sensor technology. The CMOSens® EM1 Mass Flow Meter therefore provides unbeatable performance at very attractive system cost. One single device covers a range of0.05 ln/min up to 200 ln/min . The CMOSens® EM1 runs with an internal flow integration time of 5ms. This allows correct measurement and display of fast changing signals. But very often a precise total flow over a longer period is of higher interest than a fast single measurement. For this purpose the CMOSens® EM1 Mass Flow Meter can be set to slower read out times (see Table 4). The sensor internally still integrates in 5 ms slices and recognizes fast signal changes but for the read out the total flow over the whole period is calculated. The CMOSens® Mass Flow Meter therefore is exceptionally well suited for difficult measurement conditions when fast changing gas flows must be monitored and summed up precisely. The CMOSens® EM1 Mass Flow Meter measures true mass flow independent of the ambient temperature and pressure changes. You simply connect the gas to be measured to the CMOSens® EM1 device to get an instantaneous gas mass flow integral with a selectable integration time between 5 ms and 640 ms. Depending on the type a flow range between 0.1 ln/min and up to 200 ln/min can directly be measured by connecting the CMOSens® EM1 Mass Flow Meter. In addition to mass flow, the CMOSens® EM1 device provides information about the temperature on the CMOSens® sensor element. Both mass flow and temperature data are accessed through an RS232 or SPI interface. The RS232 interface allows you to directly connect the CMOSens® EM1 Mass Flow Meter to a PC. The serial peripheral interface (SPI) also enables the CMOSens® EM1 Mass Flow Meter to be used in smaller micro controller systems. If a special interface such as 420 mA current output or other or another flow range is required, contact Sensirion for a customer specific solution.

Please contact Sensirion before using any corrosive, toxic or explosive gas types (see also section 1.5 and 1.7). However, the standard calibration gas is nitrogen. Please contact Sensirion, ifyou would like to use the sensor for applications with other gases. A free PC software to read out the CMOSens® EM1 Mass Flow Meter can be downloaded from www.sensirion.com.

CMOSens® sensor technology

CMOSens® is the base technology for all Sensirion multi sensor modules and sensor systems. The unification of semiconductor chip and sensor technology serves as a platform for highly integrated system solutions with excellent sensor precision and reliability. With CMOSens®, the on-chip sensor element forms an integrated whole with a high-end amplification and A/D converter circuit. Due to the compact single-chip design, CMOSens® based sensors are very resistant to electromagnetic disturbances (EMC), another important technical advantage of this state of the art sensor technology. As a result, CMOSens® based multi sensor modules offer excellent sensor precision, fast response time and a very large dynamic measurement range. In addition, the digital intelligence of the CMOSens® sensor technology enables digital interfaces that permit an easy link with the system of the customer, a real advantage and benefit that results in ready-to-use problem solutions.

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Data Sheet EM1 -v2.5/ August 2006

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