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> Guidingpages9-11 > Guiding and measuringpage12 > Positioningpage13 > Positioning with actuationpages14-15 NanoX is a high-end positioning system for clean-room applicationsThanks to its superior design andSCHNEEBERGER MINIRAIL’s, thiscost-effectiveplatform demonstra-tes outstandingly rigid mechanicalproperties.Stability in nanometer range, irre-spective of position, guaranteeshighest efficiency. Your advantages at a glance: » Low initial costs » Minimum integration outlay » Nanometer stability irrespective of position » Consistently high traversing speed » Fewer positioning errors » More wafers per hour! NanoX moves not only rapidly but also positions in a hithertounparalleled time and stability.Thanks to this exceptional «step-and-settle» performance itachieves shorter cycle times, higher quality and consequentlygreater productivity.
Travel Settling time
Settling time SCHNEEBERGER systemOther systems Time Motion time • 15