Microcontamination Inspection Service
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This analytical service from SAES Pure Gas has been developed to provide end-users of lithography, inspection, and metrology equipment with a simple and reliable tool for parts-per-trillion (pptV) molecular contaminant certification. The CollectTorr Sampling System is fully qualified by ASML™ and the other major lithography and metrology tool manufacturers. Tool owners can utilize CollectTorr for warranty certification of all facility gases, cleanroom air and compressed dry air. Trap #1 Control Trap Trap #2 Acids Trap #3 Bases Trap #4 Hydrocarbons / Refractory Compounds Applications • Purge gas certification for optics • Lithography, inspection, metrology tool certification • Pre/post purifier assessment • Gas piping and component outgassing survey • Cleanroom analysis Analytical Service Features • Part-per-trillion volume (pptV) sensitivity • Single sample connection which is easy to install • Compact design which can be put in any orientation • Solid-state trap sampling technology, no liquid impingers • No utilities required Sampling Service Logistics 1. Sampling kit shipped to customer 3. Unattended collection 4 - 72 hours 4. Send back to SAES Pure Gas 5. Analysis report delivered within one week

Pressurized Gas N2, CDA, COz, Ar, He, H2 Pressure required: 30-120 psig Flow required: 6 slpm Connection: 1/4” VCR Detection Limits 72 hour Sampling Detection Limits 6 hour Sampling SAES Pure Gas The Technology of Pure Gas 4175 Santa Fe Road San Luis Obispo, CA, 93401, USA Phone: +1 805-541-9299 E-mail: spg@saes-group.com Website: www.saespuregas.com SAES Pure Gas is ISO9001 certified © 2016 SAES Pure Gas. Printed in USA. All rights reserved. SAES Pure Gas reserves the right to change or modify product specifications at any time without notice. Sampling time can be adjusted to meet...