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Purifier, Valve, Mass flow controller, Thermal mass flow controller, Shut-off valve
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www.qualiflow.com
catalogue D00-015 V02 (E)
Vaporization
systems
CERT IF IED
QUALITYSYSTEM
395, rue Louis Lépine - BP7 - 34935 Montpellier - Cedex 9 - France - sales@qualiflow.com - tel# (0)4 67 99 47 47 fax# (0)4 67 99 47 48
Specifications are subject to change without notice
LM-2100A
Features :
- The LM-2100A liquid mass flow meter measures various liquid material flow rates with high precision.
- The patented original thermal mass flow sensor is incorporated for measuring flow rate. Digital electronics provides high-speed reliable flow rate measurement.
- Combined with the flow rate control valve CV series, high precision liquid flow rate control is possible.
- In addition, combination with vaporizer VU series makes high precision and high speed vaporization possible.
Liquid Mass Flow Meter
Features
Model / Details
Specifications
Liquid flow rate
0.05 - 10 g/min
Accuracy
% F.S.
±1
Linearity
% F.S.
±0.5
Repeatability
% F.S.
±0.2
Pressure capacity
1000 kPa
Operation temperature
15 - 35°C
Temperature coefficient
% F.S. / °C
Zero 0.1
Span 0.1
Leak integrity
He
1.10-10 scc/sec
Flow rate command
0 - 5 VDC
Flow rate output
0 - 5 VDC
Power supply requirements
+15 V, 100 mA
-15 V, 200 mA
Digital communication
Digital interface
RS-232C
Alarm output
Open collector output
Zero adjustment input
Possible
Preset input
Possible
Standard fittings
Inlet
" VCR male
Outlet
" VCR male
Wetted materials
Body
SS316L
Seals
Au
Flow sensor
SS316L
Mounting direction
Free
Weight
800 g
Standard accessories
Main connector
D05 8 pin
Communication
CC-DOSF (D-SUB 9 pin)
Cable (optional)
CC-T2 (D-SUB 25 pin)
Options
Surface polishing
Anti-corrosive plating
Pt Seals
· Please inform Qualiflow of the type and chemical property of the liquids you intend to use.
· If you can provide a particular liquid for Qualiflow, a flow rate calibration can be carried out for a fee.
· Some liquids might not be accepted to handle by Qualiflow.
· For information not included in this datasheet, please contact Qualiflow sales representative.
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