Digital Gas Mass Flow Controllers & Meters MC-5000 - QUALIFLOW - #1

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www.qualiflow.com catalogue D00-015 V02 (E) Mass flow controllers & accessories C ER TI FI E D QUALITY SYSTEM 395, rue Louis Lépine - BP7 - 34935 Montpellier - Cedex 9 - France - sales@qualiflow.com - tel# (0)4 67 99 47 47 fax# (0)4 67 99 47 48 Specidications are subject to change without notice Mass Flow Controller MC-5000 series M C - 5 0 0 0 S e r i e s S p e c i f i c a t i o n s Flow Range (N2 equivalent) 5 sccm~5 slm (NO valve) 5~20 slm 20~50 slm (NO valve) Control Range 2~100% F.S. Valve Actuator Piezoelectric Valve Seat PCTFE Valve Rest Position Normally Open or Closed Accuracy <5 slm : ±(0.25% SP+0.25% F.S.) <20 slm : ±(0.45% SP+0.25% F.S.) <50 slm : ±(0.75% SP+0.25% F.S.) Linearity ±0.5% F.S. Repeatability ±0.15% F.S. Response Time (SEMI E17-91) 1 sec (typical) Operating Temperature 0~50°C (32~122°K) Temperature Coefficient (zero) ±0.02% F.S./°C Temperature Coefficient (span) <5 slm : ±0.02% F.S./°C <20 slm : ±0.04% F.S./°C <50 slm : ±0.08% F.S./°C Calibration Pressure standard 1.5 bar (21 psi) Operating Pressure <5 slm : 0.5~3 bar (7~43 psi) <10 slm : 1~3 bar (14~43 psi) <20 slm : 1.5~3 bar (21~43 psi) <50 slm : 1~3 bar (14~43 psi) Maximum Inlet Pressure 106 Pa (10 bar, 145 psi) Wetted Materials 316L stainless steel, PCTFE, Au Surface Finish LEP: 0.5 ìm Ra max Leak Integrity <1.10-10 atm.scc/sec (He) Standard Seals Metal (Gold), Pt (option) Fittings ¼’’ VCR, W-Seal, C-Seal P o w e r R e q u i r e m e n t s Mass Flow Controller 11~25 VDC (5 VA max) Digital Control DeviceNet Electrical Connector 5-pin DeviceNet connector F e a t u r e s DeviceNet (ODVA) digital interface. High performance 1’’1/8 digital MFC. New generation piezoelectric valve. Single power supply operation 11-25VDC. Surface mounting configuration. LINTEC Co., Ltd. patent pending ambient temperature compensated flow sensor (US and Japan). P i e z o e l e c t r i c V a l v e A d v a n t a g e s The New Generation Piezoelectric Valve MFC’s springless metal design offers : - very fast response time, - extremely low dead volume, - great stability (to pressure variation), - particle prevention. M e t a l D e s i g n A d v a n t a g e s Combined with the new generation piezoelectric valve, metal seals and superior surface finishing within the MFC contribute to ultra clean performances. D i g i t a l A d v a n t a g e s Dynamic control in the gas line. Optimized digital control. DeviceNet communication interface (SEMI E54 and ODVA SEMI SIG MFC profile). Up to 10 calibration curves of different gases stored in processor memory. O p t i o n s Small flow range from 1 to 5 sccm (NO valve). Wide range of control (0.5 to 100% F.S). Multi-calibration. Various calibration pressure.