Digital Gas Mass Flow Controllers & Meters AFC 202D, AFM 302D, - QUALIFLOW - #1

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www.qualiflow.com catalogue D00-015 V02 (E) Mass flow controllers & accessories 395, rue Louis Lépine - BP7 - 34935 Montpellier - Cedex 9 - France - sales@qualiflow.com - tel# (0)4 67 99 47 47 fax# (0)4 67 99 47 48 Specidications are subject to change without notice Digital Mass Flow Controller / Meter AFC 202D / AFM 302D AFC & AFM Series Specifications Flow Range (equivalent N2) 30 slm to 250 slm up to 400 slm with H2 Control Range 2 and 100% F.S. Valve Type Electromagnetic Valve Rest Position Normally Open or Closed Linearity ±0.2% of setpoint (per calibration gas) Repeatability ±0.15% of F.S. Sensibility to Mounting Position ±0.1% of F.S. Step Response Time ..2.5 sec. typical (SEMI E17-91) Temperature Range 5 — 50°C, non-condensing Temperature Coefficient <0. 5% F.S. /°C Maximum Inlet Pressure 1 MPa (10 bar, 150 psi) Minimum Differential Pressure 150 kPa for 30 slm F.S. 200 kPa for 50 slm F.S. 250 kPa for 100 slm F.S. 300 kPa for 200 slm F.S. 450 kPa for 400 slm F.S. Pressure Coefficient <0.1% F.S./105 Pa Wetted Materials 316 L Stainless steel Kel-F Seals material Surface Finish 0.4 ìm (16 ìinch) Ra max Leak Integrity <2.10-9 atm.scc/sec (He) Standard Seals Viton Neoprene Fittings 3/8’’ M VCR, Swagelok, other on request Weight 3.7Kg Input and Output Mass Flow Controller ±15 VDC, 1 A Mass Flow Meter ±15 VDC, 50 mA Input and Output Signal from 0 to 5 VDC Digital Control RS232C, Active full time Electrical Connector Sub-D 15 pins Male Features For high flow from 30 slm up to 250 slm, the highest performances of digital P.C.B. combined with elastomeric seals on the Qualiflow Therm AFC 202D and AFM 302D : - Full potential of digital technology. - 100% compatible with analog AFC202 using Sub-D 15 pin adapter (P/N Q2001733-09 or Q2001733-10). - Special pressure compensated stainless steel valve for ultra fast flow control. Accuracy During calibration, a polynomial curve (fourth degree) calculated from 6 points gives an accuracy of : ±1% of setpoint if setpoint >30% of F.S. ±0.3% of F.S. if setpoint <30% of F.S. Less Inventory Up to 10 calibration curves of different gases can be stored into the memory, easily changeable by user. To keep the benefit of accuracy, the maximum factor between the full scales is 3. A factor of 5 maintains an accuracy less than ±1%, compatible with analog MFCs. Optimized Numerical Control The control of gas flow is done by a numerical algorithm assuming a control without overshoot at any setpoint and improving the response time. Each calibration curve is stored with its own regulation parameters. Communication Modes Analog mode : the MFC is 100% compatible with analog series, with the advantage to communicate via serial RS232C for maintenance, calibration. RS485 option : allows to control up to 32 MFCs under MODBUS protocol (RJ11 connector). PROFIBUS high speed fieldbus. Calibration MFCs are calibrated with Nitrogen Reference Standards Temperature .. 273.15K Pressure .. 101325 Pa Options External sensor input DeviceNet or Profibus fieldbus connection RS485 / Modbus with 2 RJ11 connections