Analog Gas Mass Flow Controllers & Meters AFC 50, AFM 55 - QUALIFLOW - #1

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www.qualiflow.com catalogue D00-015 V02 (E) Mass flow controllers & accessories Specidications are subject to change without notice 395, rue Louis Lépine - BP7 - 34935 Montpellier - Cedex 9 - France - sales@qualiflow.com - tel# (0)4 67 99 47 47 fax# (0)4 67 99 47 48 Mass Flow Controller / Meter AFC 50 / AFM 55 AFC & AFM Series Specifications Flow Range (equivalent N2) 10 sccm to 25 slm Control Range 2 — 100% F.S. Valve Type Electromagnetic Valve Rest Position Normally Open or Closed Accuracy ±1% of F.S. Linearity ±0.5% of F.S. Repeatability ±0.2% of F.S. Sensibility to Mounting Position ±0.1% of F.S. Step Response Time .. 2 sec. typical (SEMI E17-91) Operating Temperature 5..50°C, Non-condensing Temperature Coefficient < 0.5% F.S./°C Maximum Inlet Pressure 1 MPa (10bar, 150psi) Minimum Differential Pressure 50 kPa (0.5bar, 7psi) 3 kPa (30mbar, 0.45psi) mini with low DP option Maximum Differential Pressure 300 kPa (3bar, 43psi) Pressure Coefficient < 0.1% F.S./105 Pa Wetted Materials 316 L Stainless steel Kel-F Seals material Surface Finish 0.4 ìm (16 ìinch) Ra max Leak Integrity < 2.10-9 atm.scc/sec (He) Standard Seals Viton, Neoprene Fittings ¼” VCR, Swagelok Weight 0.6Kg Features The traditional analog Qualiflow Therm AFC 50 and AFM 55 with elastomeric seals and magnetic valve : - Unique fast and reliable horizontal magnetic valve. - Low pressure drop option for TEOS SDC, TiCl4, etc… Using Large sensor diameter gives very low pressure drop and defeats contamination and clogging. - Perfect flow splitting through special bypass design, giving optimal linearity and accuracy. - Good surface finish for ultra clean operation. - Normally open and normally closed version available with color identification (green for NO, red for NC). - Gasketed endplates, no threading. - Purge command with control software. Calibration MFCs are calibrated with Nitrogen Reference Standards Temperature .. 273.15K Pressure .. 101325 Pa Input and Output Mass Flow Controller ±15 VDC, 200 mA Mass Flow Meter ±15 VDC, 50 mA Input and Output Signal from 0 to 5 VDC Electrical Connector Sub-D 15 pins Male Options External sensor input Kalrez seals Low differential pressure Card edge adaptor Compatible with AFC 261