Analog Gas Mass Flow Controllers & Meters AFC 202, AFM 302 - QUALIFLOW - #1

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www.qualiflow.com catalogue D00-015 V02 (E) Mass flow controllers & accessories 395, rue Louis Lépine - BP7 - 34935 Montpellier - Cedex 9 - France - sales@qualiflow.com - tel# (0)4 67 99 47 47 fax# (0)4 67 99 47 48 Specidications are subject to change without notice Mass Flow Controller / Meter AFC 202 / AFM 302 AFC & AFM Series Specifications Flow Range (equivalent N2) 30 sccm to 250 slm up to 400 slm with H2 Control Range 2 — 100% F.S. Valve Type Electromagnetic Valve Rest Position Normally Open or Closed Accuracy ±1% of F.S. Linearity ±0.5% of F.S. Repeatability ±0.3% of F.S. Sensibility to Mounting Position ±0.1% of F.S. Step Response Time .. 5 sec. typical (SEMI E17-91) Operating Temperature 5..40°C, Non-condensing Temperature Coefficient < 0.5% F.S./°C Maximum Inlet Pressure 1 MPa (10bar, 150psi) Minimum Differential Pressure 150 kPa for 30 slm F.S. 200 kPa for 50 slm F.S. 250 kPa for 100 slm F.S. 300 kPa for 200 slm F.S. 450 kPa for 400 slm F.S. Pressure Coefficient < 0.1% F.S./105 Pa Wetted Materials 316 L Stainless steel Surface Finish 0.4 ìm (16 ìinch) Ra max Leak Integrity < 2.10-9 atm.scc/sec (He) Standard Seals Viton, Neoprene Fittings 3/8’’ M VCR, Swagelok, other on request Weight 3.7Kg Features For high flow from 30 slm to 250 slm, the traditional analog Qualiflow Therm AFC 202 and AFM 302 with elastomeric seals and magnetic valve : - Unique fast and reliable horizontal magnetic valve. - Normally open and normally closed version available with colour identification (green for NO, red for NC ). - Special pressure compensated stainless steel valve for ultra fast flow control. - No particle generation or entrapment. Calibration MFCs are calibrated with Nitrogen Reference Standards Temperature .. 273.15K Pressure .. 101325 Pa Input and Output Mass Flow Controller ±15 VDC, 1 A Mass Flow Meter ±15 VDC, 50 mA Input and Output Signal from 0 to 5 VDC Electrical Connector Card edge