Optical Probes and Sensors - PRECITEC - #1

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CHRocodile S, CHRocodile E, CHRocodile X, CHRocodile M4, CHRocodile M10 PRECITEC OPTICAL PROBES The optical probes for non-contact distance and thickness measurements have a wide measuring range: from a few microns to several millimeters. They have the following advantages: • precise measurements independent of the surface type • high axial resolution for the measurement of intricate structures • measurements also on highly tilted, reflective and dispersive surfaces • small spot diameter • robust and compact design RELIABLY FAST MEASUREMENTS ON CHALLENGING SAMPLES The superior dynamic range and excellent signal-to-noise ratio of the detectors used in the CHRocodile sensors offer excellent measuring results even on variably reflective surfaces. Examples: a) sample with differing reflective properties (auto-adjustment enables continuous measurement) b) sample with reflective, wavy surface (high aperture captures sufficient light even at large angles) All probes are available in a vacuum version. In addition there are angled, space saving, and flat probes obtainable. That means: For every application the perfect probe! Order number RB 200 232 RB 200 031 RB 200 136 RB 200 241 RB 200 003 RB 200 225 RB 200 137 RB 200 050 RB 200 074 RB 200 071 RB 200 076 RB 200 135 RB 200 006 RB 200 061 RB 200 085 RB 200 235 RB 200 099 RB 200 132 RB 200 134 Measuring range 100 ìm 300 ìm 350 ìm 400 ìm 600 ìm 1 mm 2 mm 3 mm 6 mm 10 mm 25 mm 100 ìm Working distance 1) 1.85 mm 4.5 mm 8.4 mm 15.3 mm 6.5 mm 20.8 mm 61 mm 22.5 mm 35 mm 70 mm 76.5 mm 6.5 mm 27 mm 9.5 mm 101 mm 19.4 mm 23 mm 27 mm 23 mm Resolution in z 3 nm 10 nm 12 nm 14 nm 20 nm 35 nm 70 nm 100 nm 200 nm 300 nm 800 nm 10 nm 10 nm 10 nm 10 nm IT 250: 75 nm IT 250: 75 nm 100 nm 100 nm IT 500: 100 nm IT 500: 100 nm IT 1000: 200 nm IT 1000: 200 nm Spot diameter 3.5 ìm 5 ìm 5 ìm 4 ìm 4 ìm 3.5 ìm 12.5 ìm 12 ìm 16 ìm 24 ìm 25 ìm 1.4 ìm 40 ìm 10 ìm 50 ìm 13 ìm 13 ìm 9 ìm 9 ìm Lateral resolution 1.8 ìm 2.5 ìm 2.5 ìm 2 ìm 2 ìm 1.8 ìm 6 ìm 6 ìm 8 ìm 12 ìm 12.5 ìm 0.7 ìm 20 ìm 5 ìm 25 ìm 6.5 ìm 6.5 ìm 4.5 ìm 4.5 ìm Numerical aperture 0.7 0.5 0.33 0.7 0.5 0.7 0.26 0.5 0.43 0.33 0.26 0.66 0.09 0.17 0.1 0.12 0.12 0.12 0.12 Measurement angle to surface 2) 90° +/- 45° 90° +/- 30° 90° +/- 20° 90° +/- 45° 90° +/- 30° 90° +/- 45° 90° +/- 15° 90° +/- 30° 90° +/- 25° 90° +/- 20° 90° +/- 15° 90° +/- 40° 90° +/- 5° 90° +/- 10° 90° +/- 5° 90° +/- 5° 90° +/- 5° 90° +/- 5° 90° +/- 5° Thickness measuring range 3) up to 150 ìm up to 450 ìm up to 525 ìm up to 600 ìm up to 900 ìm up to 1.5 mm up to 3 mm up to 4.5 mm up to 9 mm up to 15 mm up to 37.5 mm up to 150 ìm Der Messbereich richtet sich nach der verwendeten CHRocodile Auswerteeinheit Dimensions l = 67.9 mm l = 111 mm l = 105.8 mm l = 148.5 mm l = 125 mm l = 163.6 mm l = 108.7 mm l = 105.8 mm l = 197 mm l = 146 mm l = 243 mm l = 158 mm l = 53.6 mm l = 53.6 mm l = 129.2 mm l = 26.5 mm l = 53.3 mm l = 46.6 mm l = 53.3 mm d = 8 mm d = 15 mm d = 15 mm d = 50 mm d = 19 mm d = 55 mm d = 45 mm d = 49 mm d = 52 / 70 mm d = 65 mm d = 76 mm d = 30 mm d = 15 mm d = 15 mm d = 28 mm d = 15 mm d = 20 mm d = 20 mm d = 20 mm Weight 36 g 38 g 36 g 1250 g 71 g 1118 g 315 g 501 g 1244 g 721 g 1637 g 323 g 21 g 21 g 278 g 22 g 115 g 88 g 79 g Note high numerical high numerical high numerical extra bright extra bright extra bright extra bright extra bright high numerical aperture aperture aperture aperture Regarding interferometric measurements the working distance can vary several millimeters. By using an LED sensor the measuring range of the chromatic probes decreases up to 10 %. 1) bottom of probe to middle of measuring range 2) decreasing accuracy on the limits 3) refractive index n = 1.5 CHRocodile LR CHRocodile S, CHRocodile E, CHRocodile X, CHRocodile M4, CHRocodile M10 CHRocodile IT, CHRocodile MI5 CHRocodile LR The measuring range depends on the used CHRocodile sensor. The measuring range depends on the used CHRocodile sensor. Sensor Application distance and thickness distance thickness thickness distance thickness distance and thickness and thickness und thickness Measuring principle chromatic confocal chromatic interferometric interferometric interferometric interferometric interferometric confocal with reference with reference a) b)