Optical Probes and Sensors - PRECITEC - #2

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OPTICAL SENSORS CHRocodile sensors feature high measuring rates. They allow precision measurements and are able to be used as standalone sensors or integrated into production machines for inline measurements. CHRocodile sensors work with the chromatic confocal and interferometric measuring principles using light in the visible and the infrared spectral range. They are proven in the glass, plastic and semiconductor industries and are implemented in measuring systems and inspection machines for numerous types of quality control. CHRocodile M4 Modular sensor designed specifically for inline applications with up to 4 channels integrated into a 19 inch slot. Two different types available: High Sensitivity - very bright High Resolution - high dynamic CHRocodile M10 Synchronized measurements with up to 10 channels. Precitec Optronik GmbH • Raiffeisenstr. 5 • 63110 Rodgau (Germany) • Phone: +49 (0)6106-8290-0 • Fax: +49 (0)6106-8290-26 Internet: www.precitec-optronik.com • E-mail: info@precitec-optronik.de • www.chrocodile.com PRECITEC Stand: 10.04.2009; subject to change without prior notice OPTICAL PROBES AND SENSORS CHRocodile If time matters... PRECITEC CHRocodile E, CHRocodile X These well established, high-end sensors are designed for the most precise non-contact topography and thickness measurements. The Xenon-technology of CHRocodile X allows the measurement on dark surfaces at a very high measuring rate. CHRocodile S Alternative sensor for demanding measuring tasks with an excellent price-performance ratio. CHRocodile LR Sensor with higher lateral resolution for ambitious topography measurements. CHRocodile IT Sensor optimized for thickness and distance measurements of silicon wafers and multilayers with transmitted infrared light. CHRocodile MI5 Modular, multi-channel sensor (up to 5 channels) based on CHRocodile IT for inline applications in the wafer and solar cell industry. CHRocodile LR RB 200 140 distance, thickness 4000 (chromatic) 4000 (interferometric) 30 - 1200 ìm < 0.02 trigger input, synchronizing output, 3 encoder inputs USB, RS 232, 2 x analog (0 - 10 V) NIR SLD 260 mm x 115 mm x 310 mm 5 kg 85 - 264 V AC / 47 - 63 Hz 15 W 1 16 automatic light control CHRocodile M10 RB 200 221 distance, thickness 15000 / number of active channels – < 0.009 trigger input, synchronizing output, 3 encoder inputs (optional 5) Ethernet, USB, 2 x analog (0 - 10 V) Halogen lamp 360 mm x 160 mm x 400 mm 11 kg 90 - 264 V AC / 47 - 63 Hz 150 W 10 16 multi-channel sensor CHRocodile M4 RB 200 114 (high resolution) RB 200 112 (high sensitivity) distance, thickness 4000 (chromatic) 4000 (interferometric, high resolution module) 2 - 250 ìm (high resolution module) 0.012 (high sensitivity) 0.009 (high resolution) trigger input, synchronizing output, 3 encoder inputs / channels RS 232, RS 422, USB, 2 x analog (0 - 10 V) Halogen lamp 19'' x 3 HE x 306 mm 10 kg 85 - 264 V AC / 47 - 63 Hz 135 W (+5 W per add. channel) 1 - 4 16 module available as high resolution or high sensitivity version CHRocodile X RB 200 120 distance, thickness 14000 (chromatic) 1) 4000 (interferometric) 3 - 250 ìm < 0.009 trigger input, synchronizing output, 3 encoder inputs (optional 5) Ethernet, USB, RS 232, 2 x analog (0 - 10 V) Xenon - short arc lamp 360 mm x 160 mm x 400 mm 11 kg 100 - 240 V AC / 47 - 63 Hz 110 W 1 10 fast measurements also on dark surfaces CHRocodile E RB 200 110 RB 200 188 (LED) distance, thickness 4000 (chromatic) 4000 (interferometric) 2 - 250 ìm < 0.009 trigger input, synchronizing output, 3 encoder inputs USB, RS 232, 2 x analog (0 - 10 V) Halogen lamp / LED 260 mm x 115 mm x 310 mm 4.5 kg 90 - 264 V AC / 47 - 63 Hz 140 W (LED 20 W) 1 16 LED version with automatic light control CHRocodile S RB 200 253 distance, thickness 2000 (chromatic) 2000 (interferometric) 3 - 180 ìm < 0.009 trigger input, synchronizing output, 3 encoder inputs USB, RS 232, RS 422, 2 x analog (0 - 10 V) LED / ext. light source 200 mm x 100 mm x 93 mm 1.1 kg 15 - 36 V DC with separate power supply (90 - 264 V AC) 10 W 1 16 tabletop unit or top hat rail mounting; automatic light control 2 - 50 m + 5° C up to + 50° C 1) also on dark surfaces 2) optical length 3) measuring accuracy = linearity error + pitch error x used measuring range 4) optionally with RS 422, LVDT for emulation of roughness probes additionally 5) metal covered also available The measuring range depends on the used probe. 0.033 % of measuring range 0.003 % of measuring range (15 bit); optionally 0.00001 % (23 bit) RS 232 (9600 - 921600 Baud); RS 422 (9600 - 921600 Baud); USB: virtual comport (921600 Baud); Ethernet (100 Mbit) < +/- 0.001 Order number Application Measurements / second Interferometric measuring range 2) Chromatic measuring range Pitch error 3) Linearity error 3) Resolution Reproducibility (in % of measuring range) Synchronization with external devices Interfaces 4) Transfer rate Light source Operating temperature Dimensions W x H x D Weight Length optical fibre 5) System voltage Rated power No. of measuring channels Calibr. tables / channels Note 0.007 % of measuring range; optionally 0.00002 % CHRocodile IT RB 200 223 (CHRocodile IT 250) RB 200 117 (CHRocodile IT 500) RB 200 113 (CHRocodile IT 1000) distance, thickness 4000 (interferometric) IT 250: 28 - 1100 ìm IT 500: 34 - 1900 ìm IT 1000: 60 - 3500 ìm – < 0.02 trigger input, synchronizing output, 3 encoder inputs USB, RS 232, 2 x analog (0 - 10 V) NIR SLD 260 mm x 115 mm x 310 mm 5 kg 85 - 264 V AC / 47 - 63 Hz 15 W 1 - 3 measuring ranges available; special version for rough wafer (IT RW); automatic light control CHRocodile MI5 RB 200 270 (CHRocodile MI5 250) RB 200 264 (CHRocodile MI5 500) RB 200 259 (CHRocodile MI5 1000) distance, thickness 4000 (interferometric) MI5 250: 28 - 1100 ìm MI5 500: 34 - 1900 ìm MI5 1000: 60 - 3500 ìm – < 0.02 trigger input, synchronizing output, 3 encoder inputs / channels USB, RS 232, 2 x analog (0 - 10 V) NIR SLD 19'' x 3 HE x 306 mm 13 kg 85 - 264 V AC / 47 - 63 Hz 16 W (+8 W per add. channel) 1 - 5 - 3 measuring ranges available; special version for rough wafer (IT RW); automatic light control