Optical 3D-Measuring Systems - PRECITEC - #2

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Legend 1) Accuracy and measuring rate is dependent on the sensor and the optical probe 2) Specify travel length based on sample/customer need NEMESIS X NEMESIS P X Sensor 1) Portal construction Granite Granite Granite air suspension on steel frame Granite air suspension on steel frame Portable Portable Granite air suspension on steel frame Travel x, y 2) 50 mm x 50 mm 100 mm x 100 mm 250 mm x 250 mm 150 mm x 150 mm 25 mm x 25 mm 100 mm x 100 mm 600 mm x 600 mm Drives x, y Piezo linear drive Piezo linear drive Piezo linear drive DC Servo drive Piezo linear drive Piezo linear drive Maximum traverse rate per axis x, y 200 mm/s 200 mm/s 200 mm/s 70 mm/s 20 mm/s 20 mm/s Encoder resolution x, y Linear encoder 0,1 ìm Linear encoder 0,1 ìm Linear encoder 0,1 ìm Rotation encoder 0,25 ìm Linear encoder 0,1 ìm Linear encoder 0,1 ìm Positioning accuracy per axis over total length x, y 1,5 ìm 2,0 ìm 3,0 ìm 1,5 ìm 1,5 ìm 2,0 ìm Reproducibility per axis x, y < 0,3 ìm < 0,3 ìm < 0,3 ìm < 0,5 ìm < 0,5 ìm < 0,5 ìm Maximum deviation from straightness/ flatness per axis x, y ± 0,2 ìm (per 10 mm travel) ± 0,5 ìm (per 50 mm travel) ± 0,4 ìm (per 10 mm travel) ± 1,0 ìm (per 100 mm travel) ± 1,0 ìm (per 10 mm travel) ± 4,0 ìm (per 250 mm travel) ± 0,25 ìm (per 10 mm travel) ± 1,5 ìm (per 150 mm travel) 0,5 ìm 1,0 ìm Travel z axis 2) 50 mm 50 mm 100 mm 150 mm Drive z Maximum traverse rate z axis 5 mm/s 5 mm/s 5 mm/s 5 mm/s Encoder resolution z Linear encoder 0,1 ìm Linear encoder 0,1 ìm Linear encoder 0,1 ìm Linear encoder 0,1 ìm Positioning accuracy over total length of z axis 1,5 ìm 1,5 ìm 2,0 ìm 2,0 ìm Reproducibility z axis 1,0 ìm 1,0 ìm 1,0 ìm 1,0 ìm Maximum deviation from straightness/ flatness z axis ± 0,2 ìm (per 10 mm travel) ± 0,5 ìm (per 50 mm travel) ± 0,2 ìm (per 10 mm travel) ± 0,5 ìm (per 50 mm travel) ± 0,4 ìm (per 10 mm travel) ±1,0 ìm (per 100 mm travel) ± 1,0 ìm (per 10 mm travel) ± 1,5 ìm per 150 mm travel) Maximum sample load 5 kg 5 kg 12 kg 5 kg unlimited unlimited 100 kg Color camera with macro objektive and back lighting no optional yes optional no no yes W: Dimensions H: L: 520 mm 655 mm 430 mm 520 mm 655 mm 430 mm 722 mm 1630 mm 658 mm 868 mm 1590 mm 728 mm 150 mm 120 mm 170 mm 230 mm 150 mm 250 mm 1175 mm 1627 mm 995 mm Weight 110 kg 115 kg 295 kg 450 kg 2,3 kg 3,8 kg 350 kg Drives must be specified: Electro linear drive with linear encoder, Spindle drive with DC Servo with rotation encoder, Piezo linear drive with linear encoder, Step drive Micrometer hand adjustment DC Servo motor, with brake Precitec Optronik GmbH • Raiffeisenstraße 5 • D-63110 Rodgau (Du) • Phone: +49 (0)6106-8290-0 • Fax: +49 (0)6106-8290-26 • Internet: www.precitec-optronik.de • E-mail: info@precitec-optronik.de PRECITEC Sensor NEMESIS V NEMESIS X N E M E S I S X X V NEMESIS WT N E M E S I S P V NEMESIS P X THETIS NEMESIS V-XXV Universal system for topography and thickness measurements. NEMESIS P V - X Portable system for topography and thickness measurements. NEMESIS WT Thickness- and simultaneous topography measurements of non transparent surfaces (i.e. SiC wafer). THETIS Stationary platform allows for liquid and variable weighted samples measurement. Version: 30.04.2006; subject to change without notice CHRocodile Micrometer hand adjustment