tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:23.00pt "Arial", sans-serif; } .font1 { font:19.00pt "Lucida Sans Unicode", sans-serif; } .font2 { font:22.00pt "Lucida Sans Unicode", sans-serif; } .font3 { font:38.00pt "Lucida Sans Unicode", sans-serif; } .font4 { font:86.00pt "Tahoma", sans-serif; } MIPOS micro objective / tons positionlng Systems a piezosyszemjena incredibly prcise

tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:6.00pt "Arial", sans-serif; } .font1 { font:6.00pt "Lucida Sans Unicode", sans-serif; } .font2 { font:7.00pt "Lucida Sans Unicode", sans-serif; } .font3 { font:8.00pt "Lucida Sans Unicode", sans-serif; } The sries MIPOS actuators were developed for the fine adjustment of micro objective lenses and for the adjustment for the whole nosepiece (MIPOS N90). sries MIPOS 20, 100, 250, 500 They provide a motion range from 20 um up to 500 um - depending on the type of actua-tor. The resolution is very high, and in prac-tice only limited...

tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:4.00pt "Arial", sans-serif; } .font1 { font:8.00pt "Arial", sans-serif; } piezosystem jena GmbH Pruessingstr. 27 D-07745 Jena phone: +49-(0)3641-6688-0 fax: +49-(0)3641-6688-66 e-mail: [email protected] www.piezojena.com www.grafides.de Druckstelle Weimar