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translation systems withLVDT measurement systems

• no hysteresis• no creep • high accuracy • good dynamicLVDT inductive measurement system translation system PX 500 LVDT

technical data: part no.: S-605-86 motion (open loop):590 µmmotion (closed loop):450 µm operating voltage:–10 to +150 V LVDT – measurement systems are placed inside the translationsystem at the location where the motion should be known. The system offers high linearity (up to 0.1% - 0.2% related to the full motion) and a better dynamic behavior than strain gauges. LVDT measurement systems can be replaced easily. For closed loop work, translation systems with LVDT measurement systems have to be combined with the electronic system ENV. Closed loop operation is possible only in quasistatic regime. The ENV 150 module allows for open loop dynamical operation.

tilting system PSH 2/1 LVDT

technical data: part no. K-202-05 no. of axes:1tilting angle:2 mrad operating voltage:–10 to +150 V linearity:0.01 % resolution:0.003 µrad repeatability:0.04 % resonant frequency:837 Hz dimensions: (length x width x height)60 x 40 x 28 vacuum option Other systems available on request!

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translation systems with capacitive measurement systems

• no hysteresis • no creep • resolution up to 1 nm! • highest linearity of 0.05% • high dynamicapplications

• wafer positioning• AFM microscopes manufacturer • calibration measurements • highest precision positioning in optics and micro-mechanics • laser opticsCapacitive measurement systems offer the highest resolution and linearity. They are ideally suitable for positioning with highest accuracy in semiconductor industry and for high resolution optical systems (e.g. atomic force microscopes). To get optimal results in measurement accuracy, translation systems with integrated capacitive measurement systems have to work under stable environmental conditions. Because of their compact size, capacitive sensors can be attached inside the translation system. To keep the high accuracy of the measurement stable at the position where it should be measured, it often makes sense to place the capacitive system outside the translation system. Closed loop operation is possible only in quasistatic regime. All ENV systems allow open loop dynamic operation too. Please find more technical data about capacitive measurement systems in the chapter piezoline, section 8.

translation system PX 100 CAP

• motion 100 µm • resolution 1 nm • integrated capacitive measurement system • nm-resolution in closed loop modeWith the integration of a capacitive measurement system into a PX 100 element, the closed loop positioning accuracy of this piezo- electrical system is better than 0.05% relative to the full motion of 100 µm. The resolution of a few nanometers makes this actuator an attractive choice in the field of high precision positioning and high- performance scanning.

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