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25 4xø2–6H 20 4xM3–6H 10 20 25 10 40 11 68 69 50 4xø4.3/4xø8 35.5 ø17
technical data
69 68 50 T-450-00 part no.
42 translation part tilting part
36 whole actuator motionx, y, zin µm100
capacitance (each axis) 20%in µF1.7
resonant frequency x-axisin Hz680x-axisin Hz750
z-axisin Hz580max. loadin N50
stiffness (each axis)in N/mm0.5
temperature range–20°C to 80°C tiltin mrad±2.5
operating voltagein V–10 to +150
number aof axis2
capacitance (per axis)in µF2x0.85
pivot point – center of the stage, 4 mm above top
plate
20 operating voltagein V–10 to +150
weigthin g450
dimensionslength Lin mm68width Bin mm68
height Hin mm40free center spacein mm17
thread pattern50 mm M4
cable lengthin m1
connectorLEMOSA
10 4xø2–6H 10 4xM3–6H 20 options
with integrated measurement systemPENTORSGT-450-01 part no.dimensionslength Lin mm68width Bin mm68
height Hin mm40 more options vacuum option, low temperature option please note: for the integrated tilting system a special amplifier module ENV 40 PSH for each axis isnecessary (E-103-19) .
piezosystem jena
39