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(T-450-01) PENTOR . As shown in the picture above the comple-te electronic system of a can be offe-red with integrated strain gauge measu- rement

special systems

5-axis positioning system • 150 V

PENTOR consistsof one power supply module (ENT 150), three voltage amplifier modules (ENV 40) for each translation axis and two special amplifier (ENV 40PSH) for the tilting axes. PENTOR system very well suited fordynamical applications. The tilting part is designed for „plus-minus tilting“. Their construction is tem-perature compensated: changes in thesurrounding temperature do not affect the tilting angle. Because the mirror mounts are preload, and are characte- rized by high stiffness and resonant frequency, dynamic operation is a possi- ble application. Main parts with solid state flexure hinges are made from stainless steel. The bot- tom and the plate are made from black- anodized aluminium. As an option, the Optical stages often require an open central space (e.g. for passing light). For such applications, the new trans- lation and tilting system PENTOR wasdeveloped with a 17 mm free center hole. It offers a motion in XYZ of 100 mm and a tilt of ±2.5 mrad on two orthogonal axes. Flexure hinges for the three translation axes guarantee the highest degree of parallelism over the travel range of the stage. Each axis has an built in integra- ted mechanical preload, making in new

38 • combination of a three axistranslation system and a two axis tilting system• free center hole with 17 mm diameter• integrated preload • translation each axis: 100m• tilt each direction:±2.5 mrad• solid state flexure hingesin parallelogram design without play• optional measurementsystemapplications• object handling in micro-scopes• scanning system • micropositioning use • dynamical applications • laser techniques • optical stages

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