B CY cable (PXY38) 3xN H C
K2 øA 3xN 2xM
L C X cable (PXY38) 2xP K1 6J cables (PXY100)

series PXYPXY 38PXY 100PXY 200/28

B

part no.T-201-00T-203-00motion (±10%)**x-directionin µm38100200 y-directionin µm38100200max. loadin N10075 max. voltagein V150150150 capacitance each dir. (±10%)in nF6001700 resolution open loop*in nm0.050.130.26 resonant frequencyx-directionin Hz730380 y-directionin Hz1090480stiffnessx-directionin N/µm1.551.1y-directionin N/µm1.40.95force generationx-directionin N59110 y-directionin N5395dimensionslength Lin mm254070width Bin mm254070 height Hin mm162025precision pin holes Nin mmø2 G7 x 3ø3 G7 x 4ø3 G7 x 4K1, K2in mm2, 213, 13 Jin mm89diameter central hole Ain mm2928 hole patternspacing Cin mm203226thread MM2 x 3M3 x 4M3 x 4 Pø2.2/ø4x15ø3.3/ø6x 15mounts directly toPZ 38PZ 100PX 38PX100 TRITOR 38weightin g45102 connectorLEMOSALEMOSALEMOSA* measured with E-103-18 amplifier** typical value measured with –10V to 150V *** typical value for small electrical field strength

40 3220 H 19.5 4xM2x4 4xM3x4
L40 3220 ø14 top plate base plate 2xø3.3/ø6x18 50 4xM3x4
50

series PXY with PXY 38 SGPXY 100 SGPXY 100 CAPPXY200/28 SG integrated measurement system part no.T-201-01T-203-01T-203-06motion (each axis)open loopin µm38100100200 closed loopin µm328080160dimensionslength Lin mm40606570width Bin mm40606570 height Hin mm25212025weight (±10%)in g100175* measured with E-103-18 amplifier** typical value measured with –10V to 150V *** typical value for small electrical field strength

piezosystem jena

19