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Positioner, Fiber optic switch, Piezoelectric actuator, XYZ stage, Translation stage
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séries PA series PAHL series N series RIRA
stack type actuators
series PHL
The PHL series of actuators, because of their high blocking forces, are ideally suitable for applications in the machine tool industry. This feature enables the PHL series to move a large mass and to generate high forces. The resolution is in the sub-nanometer range and is only limited by the control signal noise. These actuators are not preloaded and therefore not suitable for dynamic applications.
applications
■ mirror adjustment
■ auto-focus
■ optic alignment systems
■ laser tuning
■ nanotechnology
■ micro lithography
specifications
■ housing: stainless steel
■ top plate: 0 7 mm flat tungsten carbide
■ bottom plate: thread M6; 5 mm
options
■ strain gauge sensor as a full bridge
■ top plate - round tungsten carbide (part no. Z-299-65) size: diameter 5 mm x 2.5 mm
other options available on request
recommended supply (open loop) ENV40 (page: 68); ENV 300 (page: 70); 12V40 (page: 76)
recommended supply (closed loop) NV 40/1 CLE (page: 74); ENV40 SG (page: 68); ENV 300 SG (page: 70); 12V40 SG (page: 76)
A note on mounting these actuators The actuators must be mounted on their bot-tom side by screws only. Avoid tensile forces or forces sidewards to the top plate. Actuators without a pre-load are not suitable for dynamic applications.
PHL 60/20
■ multi-layer technique with-out pre-load
■ maximum load 3500 N
■ motion up to 100 fjm (larger motions available on request)
■ very high stiffness up to 200 Nlym
■ operating voltage up to 150 V
part no.
motion (±10%)*
capacitance (± 20%)** integrated measurement
resolution (open loop)***
nm
0.04
0.08
0.12
0.16
0.2
stiffness***
N/um
200
100
60
50
35
blocking force
N
3500
3500
3500
3500
3500
dimensions diameter D
mm
20
20
20
20
20
length L
mm
36
54
72
90
108
* typical value measured with NV 40/3 (closed loop NV 40/3 CLE) ** typical value for small electrical field strength *** please see chapter general remarks for explanation
series PHL
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