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6compact one dimensional translation stages18 series PU40…108 µmdepend on 18installationseries PX38…1500 µmx20 series PZ OEM8…400 µmz23 series PZ9…400 µmz24 7high speed piezo translation stages26 1introduction 2contact 3overview applications 4general remarks 5stack type actuator 8compact multi dimensional translation stages32 9compact multi dimensional translation stages38 series nanoX200…480 µmx26 series nanoSX320…800 µmx28 series nanoSXY120…400 µmx,y30 axis 6 12special systems56 12 3 4 series P4...80 µmz6 series PHL18...100 µmz7 series PA4…140 µmz8 series PAHL18…200 µmz10 series N2…100 µm z12 series R/RA12…25 µmz14 series PA/T 35…80 µmz16 series P/S 1318…70 µmz17 series PXY32…400 µmx,y32 series PXY-frame30…150 µmx,y34 series PXY D12 scanner6…200 µmx,y36 series PXY OEM15....16 µmx,y37 series TRITOR9…400 µmx,y,z 38 series TRITOR 101, 80…220 µmx,y,z 40 102, 200/20 series PENTOR100 µm ±2 mradx,y,z, series MICI 14090…140 µm x56 series MICI 80/18064…180 µmx57 series PZS0…1500 µmdepend on 58installationseries ROTOR9…11 mrad z60piezogripper, fibergripper0…300 µmdepend on 61installation 13accessories – adapter and extension cables, 62vacuum feed through14options64 types of integrated measurement systems64 elements with integrated measurement systems65 15electronics analogue66 modular system ENV system ENV40...800 mA66 system ENV 40, 40 mA68ENV 40 compactsystem ENV 300, 300...800 mA70ENV 800interface boards series EDA72 table top OEM piezo-amplifier NV 40/1 CLE40 mA1 channel74 NV 40/3 40 mA3 channels75 16electronicsdigital81 12V4040 mA1 channel76 30V300300 mA1 channel78 5V1010 mA1 channel80 OEM system 30DV5050 mA1 channel81 modular system d-Drive50 mA82 17piezoline8418appendix107 , 42 10mirror tilting systems44 series PSH 0.3...35 mrad x, y, x44series PSH x/2±2...±4 mrad x, y45series PSH 1-81…8 mrad x, y46series PSH 0.3/1–35 0.3...35 mradx48 11micro objective / lens positioning systems50 series MIPOS 20–10016…140 µmz50 series MIPOS 250–500200…500 µmz52 MIPOS accessories 53 series nanoMIPOS 350/450 µmz54 MIPOS N90 CAP60/90 µmz55