V-106

Long-Travel, High-Dynamics Scanning System with Voice Coil Drives

Voice Coil Linear Drives Convenient Control High-accuracy voice coil lineardrives work on the same princi- ple as electromagnetic loud-speakers. However, for preci- sion positioning applications they must provide much higherforces and high stability to holda position without jitter. They must also be designed for closed-loop operation to allow for precise positioning.These zero-friction magneticlinear drives—characterized by their excellent dynamics—are ideally suited for scanning applications requiring travel ranges in the millimeter to cen- timeter range. PI offers voicecoil drives in V-106 standardsystems; custom systems are available on request. V-106 voice coil stages can becontrolled by the C-843 digital contoller in PCI plug-in-board format. C-843 controllers are equipped with on-board linear servo-amplifiers for precisecontrol of up to four axes. Thislowers system costs and sim- plifies setup by eliminating additional external amplifiers and cables.
Ordering Information V-106.11S QuickScan Voice Coil Scanning Stage, 6 mm V-106.14S Direct Drive and DirectMetrology—Precise Motion
QuickScan Voice Coil Scanning Stage, 20 mm The design of the V-106 isbased on 3 key precision com- ponents:
V-106.11S and V-106.14S high-dynamics scanning stages with voice coil drives. Fast Scanning and Positioning Scanning Frequency 10s of Hz Travel Ranges of 20 mm and 6 mm Velocity up to 240 mm/s Linear Encoder Allows 0.2 µm Repeatability Available PCI-Card Controller with On-Board Amplifiers QuickScan™ micropositioningstages of the V-106 series weredesigned for high-dynamicsprecision scanning and posi- tioning applications, like those in biotechnology and fiber optics. They are based on zero- friction voice coil drives (linearmotors), which, combined withhigh-precision linear encoders, offer a minimal step size of 0.2 µm.V-106 micropositioning stagesachieve significantly higher dynamics than leadscrew- based units. The specially designed voice coil drive sys- tem makes possible scanningfrequencies of some tens of Hertz. With an applied load of 90 grams, the scan frequency still is 20 Hz over a travel rangeof 1 mm. The excellent dynam-ic characteristics are advanta- geous not only for scanning applications: positioning tasks see them as short settling times like 75 ms for 5 mm witha 90 gram load.
Application Examples A frictionless voice-coil (linear motor) drive

Bioanalytics

A non-contacting direct- motion metrology linear encoder for sub-micron repeatability

Scanning microscopy Semiconductor testing Micromanufacturing

Precision cross-roller bear- ings for ultra-straight and smooth motionUnlike leadscrew-driven trans-lation stages, the voice-coil lin- ear-motor in the V-106 is fric- tionless, quiet and not subject to wear and tear. In addition, itprovides higher dynamics, speed, acceleration and res- ponsiveness (step-and-settle), ideal features for high-through- put applications. The embed-ded drive also reduces thelength considerably compared to conventional motor/screw- driven stages.For highly repeatable motion, anon-contacting optical linear encoder with 0.1 µm resolutionis mounted inside the stageand feeds position information back to the motion controller.The integrated, non-contactreference switch increases ver-satility in automation applica-tions.

Microdispensing Optical device testing Photonics alignment &packaging

V-106.14S maximum scanning frequency for different loads and scanamplitudes. The graph demonstrates operation at 4 Hz with 18 mmamplitude and a velocity of up to 240 mm/s. © PI 1998-2006.Subject to change without notice. This data sheet is superseded by any newrelease. The newest release is available for download at www.pi.ws. 06/02/13.0 7a-19