M-511.HD Long-Travel, High-Speed NanopositioningSystems The M-511.HD is based on theproven design of the M-5x1
precision micropositioning
stage series, with an integrat-ed, flexure-guided, piezo actua-tor added. The M-511.HD
allows velocities to 125 mm/s
with an encoder resolution of 4 nm and load capacity of 50 kg
for horizontal operation.
Piezo • Nano • Positioning M-511.HD, M-714, C-702
Nanopositioning Systems with Hybrid Drive, Hybrid Controller
C-702 Highlights! Two channels
M-714 Heavy-DutyNanopositioning System
10kHz Sampling Rate 24-Bit Piezo MotionResolution (<1 picometer)
The M-714 was designed fromthe ground up to use the hybrid
drive technology. A high gear
reduction ratio enables the M-714 to position loads up to10 kg with nanometer preci-sion, even in the vertical direc-
tion. Compared to high-resolu-
tion magnetic linear drives, the
hybrid principle allows high
holding forces with minimumpower consumption, withoutcounterbalancing the load. The
angular deviation is less than
±10 µrad over the entire travel
range of 7 mm. The high-per-
formance drive components,
including ballscrew, bearings,motor and gearhead are cho-
sen for minimum mechanical
play and friction.
High-Resolution
Incremental Sensor with
Serial Interface Real-Time Operating
System
M-511.HD hybrid stage (left), M-714.00 (right front) and the C-702 controller (rear). Interfaces: VGA, Keyboard, Mouse, RS-232, TCP/IP Ethernet
Long Travel Ranges with Nanometer Resolution Travel Range: to 100 mm Translation/7 mm Elevation Resolution to 2 nm Velocity to 125 mm/s
Linear encoder for Highest Precision Backlash-Free Precision Ballscrew under Frictionless Piezo Drive C-702 Controller—Key toHybrid Technology The optimized interactionbetween the piezoelectric andmotorized drive components to
make them a single motion unit
requires a high-speed sensor
as well as powerful control
algorithms. The digital, 2-chan-nel, C-702 controller, based onmodern CPU technology with a
real time operating system, has
been designed for this task. It is
able to read the position sig-
nals with virtually no delay and
process the data immediately.The integrated piezo amplifiersuse a high-resolution 24-bit
DAC to fully support the high
position resolution of the piezo
industrial actuators. The new ultra-fastbroadband SSI interface for theoptical linear encoder supports
stage velocities of 600 mm/s at
a resolution of 1 nm. With cus-
tom firmware, one of the sen-
sor interfaces can be repro-grammed for use as a high-speed command interface
capable of processing com-
mands at the servo rate.
Different types of combined motorized and piezo positioning systems:a) Serially stacked drives with individual integrated position sensorsb) PI Hybrid drive with integrated, internal, high-resolution sensor, for use with highly specialized controller. Application Examples Surface inspection Microscopy Laser technology Interferometry Metrology
10 nm steps of an M-714 stage, as measured by an interferometer. 7 a - 3